Wideband MEMS Resonator Using Multifrequency Excitation

Nizar Jaber; Abdallah Ramini; Qais M. Al Hennawi; Mohammad I. Younis

doi:10.1016/j.sna.2016.02.030

Wideband MEMS Resonator Using Multifrequency Excitation

Nizar Jaber, Abdallah Ramini, Qais M. Al Hennawi, Mohammad I. Younis

Research output: Contribution to journal › Article › peer-review

25 Scopus citations

Abstract

We demonstrate the excitation of combination resonances of additive and subtractive types and their exploitations to realize a large bandwidth micro-machined resonator of large amplitude even at higher harmonic modes of vibrations. The investigation is conducted on a Microelectromechanical systems (MEMS) clamped-clamped microbeam fabricated using polyimide as a structural layer coated with nickel from top and chromium and gold layers from bottom. The microbeam is excited by a two-source harmonic excitation, where the first frequency source is swept around the targeted resonance (first or third mode of vibration) while the second source frequency is kept fixed. We report for the first time a large bandwidth and large amplitude response near the higher order modes of vibration. Also, we show that by properly tuning the frequency and amplitude of the excitation force, the frequency bandwidth of the resonator is controlled.

Original language	English (US)
Pages (from-to)	140-145
Number of pages	6
Journal	Sensors and Actuators A: Physical
Volume	242
DOIs	https://doi.org/10.1016/j.sna.2016.02.030
State	Published - Mar 9 2016

Bibliographical note

KAUST Repository Item: Exported on 2020-10-01

ASJC Scopus subject areas

Instrumentation
Surfaces, Coatings and Films
Metals and Alloys
Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering
Condensed Matter Physics

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10.1016/j.sna.2016.02.030

https://repository.kaust.edu.sa/bitstream/10754/601137/1/1-s2.0-S0924424716300851-main.pdf

Cite this

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title = "Wideband MEMS Resonator Using Multifrequency Excitation",

abstract = "We demonstrate the excitation of combination resonances of additive and subtractive types and their exploitations to realize a large bandwidth micro-machined resonator of large amplitude even at higher harmonic modes of vibrations. The investigation is conducted on a Microelectromechanical systems (MEMS) clamped-clamped microbeam fabricated using polyimide as a structural layer coated with nickel from top and chromium and gold layers from bottom. The microbeam is excited by a two-source harmonic excitation, where the first frequency source is swept around the targeted resonance (first or third mode of vibration) while the second source frequency is kept fixed. We report for the first time a large bandwidth and large amplitude response near the higher order modes of vibration. Also, we show that by properly tuning the frequency and amplitude of the excitation force, the frequency bandwidth of the resonator is controlled.",

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AU - Ramini, Abdallah

AU - Al Hennawi, Qais M.

AU - Younis, Mohammad I.

N1 - KAUST Repository Item: Exported on 2020-10-01

PY - 2016/3/9

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N2 - We demonstrate the excitation of combination resonances of additive and subtractive types and their exploitations to realize a large bandwidth micro-machined resonator of large amplitude even at higher harmonic modes of vibrations. The investigation is conducted on a Microelectromechanical systems (MEMS) clamped-clamped microbeam fabricated using polyimide as a structural layer coated with nickel from top and chromium and gold layers from bottom. The microbeam is excited by a two-source harmonic excitation, where the first frequency source is swept around the targeted resonance (first or third mode of vibration) while the second source frequency is kept fixed. We report for the first time a large bandwidth and large amplitude response near the higher order modes of vibration. Also, we show that by properly tuning the frequency and amplitude of the excitation force, the frequency bandwidth of the resonator is controlled.

AB - We demonstrate the excitation of combination resonances of additive and subtractive types and their exploitations to realize a large bandwidth micro-machined resonator of large amplitude even at higher harmonic modes of vibrations. The investigation is conducted on a Microelectromechanical systems (MEMS) clamped-clamped microbeam fabricated using polyimide as a structural layer coated with nickel from top and chromium and gold layers from bottom. The microbeam is excited by a two-source harmonic excitation, where the first frequency source is swept around the targeted resonance (first or third mode of vibration) while the second source frequency is kept fixed. We report for the first time a large bandwidth and large amplitude response near the higher order modes of vibration. Also, we show that by properly tuning the frequency and amplitude of the excitation force, the frequency bandwidth of the resonator is controlled.

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M3 - Article

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JO - Sensors and Actuators A: Physical

JF - Sensors and Actuators A: Physical

ER -

Wideband MEMS Resonator Using Multifrequency Excitation

Abstract

Bibliographical note

ASJC Scopus subject areas

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