Abstract
Experimental and theoretical investigations of photonic crystal (PhC) structures in silicon nitride/silicon dioxide (Si3 N4 Si O2) vertical waveguiding geometry are reported. One-dimensional patterns, either periodic or with cavity layers, are carved onto the channel waveguides by using focused ion beam lithography. Broadband transmittance spectroscopy in the visible and near-infrared frequency ranges is employed to show photonic band gap behavior up to the fourth order. For structures with a cavity layer, resonant peaks appear in transmittance spectra within the photonic gaps, in agreement with theory. The results show the interest of Si3 N4 Si O2 -based PhC waveguides for photonics applications from the infrared up to the visible range.
Original language | English (US) |
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Article number | 211116 |
Pages (from-to) | 1-3 |
Number of pages | 3 |
Journal | Applied Physics Letters |
Volume | 87 |
Issue number | 21 |
DOIs | |
State | Published - 2005 |
Externally published | Yes |
Bibliographical note
Funding Information:This work was supported by Ministero dell’Istruzione, dell’Università e della Ricerca (MIUR) through Cofin Program “Silicon-based photonic crystals,” by Fondazione Banca del Monte di Lombardia, and by Provincia Autonoma di Trento (PAT) through PROFILL Project.
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)