Use of Water-Soluble Sugars as Novel Cross-Linkers in Electrophilic Processes: Application to Negative-Tone Photoresists Based on Poly(4-hydroxystyrene)

S. Ming Lee; Jean M.J. Fréchet

doi:10.1021/cm00046a043

Use of Water-Soluble Sugars as Novel Cross-Linkers in Electrophilic Processes: Application to Negative-Tone Photoresists Based on Poly(4-hydroxystyrene)

S. Ming Lee, Jean M.J. Fréchet^*

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

3 Scopus citations

Abstract

The use of water-soluble sugars as latent cationic cross-linkers for polymers such as poly-(4-hydroxystyrene) has been explored. Photogeneration of acid within thin films of the phenolic resin containing the sugars results in their conversion into reactive furan moieties that lead to thermal cross-linking of the phenolic resin via electrophilic aromatic substitution in a chemically amplified process. These resist materials have demonstrated high sensitivities and resolving capabilities with both deep-UV and electron-beam radiation.

Original language	English (US)
Pages (from-to)	1838-1841
Number of pages	4
Journal	Chemistry of Materials
Volume	6
Issue number	10
DOIs	https://doi.org/10.1021/cm00046a043
State	Published - Oct 1 1994
Externally published	Yes

ASJC Scopus subject areas

General Chemistry
General Chemical Engineering
Materials Chemistry

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abstract = "The use of water-soluble sugars as latent cationic cross-linkers for polymers such as poly-(4-hydroxystyrene) has been explored. Photogeneration of acid within thin films of the phenolic resin containing the sugars results in their conversion into reactive furan moieties that lead to thermal cross-linking of the phenolic resin via electrophilic aromatic substitution in a chemically amplified process. These resist materials have demonstrated high sensitivities and resolving capabilities with both deep-UV and electron-beam radiation.",

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year = "1994",

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Y1 - 1994/10/1

N2 - The use of water-soluble sugars as latent cationic cross-linkers for polymers such as poly-(4-hydroxystyrene) has been explored. Photogeneration of acid within thin films of the phenolic resin containing the sugars results in their conversion into reactive furan moieties that lead to thermal cross-linking of the phenolic resin via electrophilic aromatic substitution in a chemically amplified process. These resist materials have demonstrated high sensitivities and resolving capabilities with both deep-UV and electron-beam radiation.

AB - The use of water-soluble sugars as latent cationic cross-linkers for polymers such as poly-(4-hydroxystyrene) has been explored. Photogeneration of acid within thin films of the phenolic resin containing the sugars results in their conversion into reactive furan moieties that lead to thermal cross-linking of the phenolic resin via electrophilic aromatic substitution in a chemically amplified process. These resist materials have demonstrated high sensitivities and resolving capabilities with both deep-UV and electron-beam radiation.

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Use of Water-Soluble Sugars as Novel Cross-Linkers in Electrophilic Processes: Application to Negative-Tone Photoresists Based on Poly(4-hydroxystyrene)

Abstract

ASJC Scopus subject areas

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