The use of water-soluble sugars as latent cationic cross-linkers for polymers such as poly-(4-hydroxystyrene) has been explored. Photogeneration of acid within thin films of the phenolic resin containing the sugars results in their conversion into reactive furan moieties that lead to thermal cross-linking of the phenolic resin via electrophilic aromatic substitution in a chemically amplified process. These resist materials have demonstrated high sensitivities and resolving capabilities with both deep-UV and electron-beam radiation.
|Original language||English (US)|
|Number of pages||4|
|Journal||Chemistry of Materials|
|State||Published - Oct 1 1994|
ASJC Scopus subject areas
- Chemical Engineering(all)
- Materials Chemistry