Tunable Bandpass Filter Based on Electrothermally and Electrostatically Actuated MEMS Arch Resonator

Amal Hajjaj, Md Abdullah Al Hafiz, Mohammad I. Younis

Research output: Chapter in Book/Report/Conference proceedingConference contribution


This paper demonstrates experimentally a wide bandpass filter based on an electrothermally tuned single MEMS arch resonator operated in air. The in-plane resonator is fabricated from a silicon-on-insulator wafer with a deliberate curvature to form an arch shape. A DC voltage is applied across the anchors to pass current through the resonator to induce heat and modulate its stiffness, and hence its resonance frequencies. We show that the first resonance frequency increases up to twice of the initial value while the third resonance frequency decreases until getting very close to the first resonance frequency. This leads to the phenomenon of veering, near crossing, where both modes exchange roles. Hence, the first resonance frequency becomes insensitive to axial forces and thermal actuation whereas the third resonance natural frequency becomes very sensitive. We demonstrate an exploitation of the veering phenomenon to realize a bandpass filter, where the first and third resonance modes are excited electrostatically simultaneously to achieve a bandpass. We demonstrate also that by driving both modes nonlinearly near the veering regime, so that the first mode shows softening behavior and the third mode shows hardening behavior, sudden jumps in the response from both modes are induced leading to sharp roll off from the bandpass to the stop band. We show a flat, wide, and tunable bandwidth and center frequency by controlling the electrothermal actuation voltage.
Original languageEnglish (US)
Title of host publicationVolume 10: Micro- and Nano-Systems Engineering and Packaging
PublisherAmerican Society of Mechanical Engineers
ISBN (Print)9780791850640
StatePublished - Feb 8 2017

Bibliographical note

KAUST Repository Item: Exported on 2021-03-30


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