TY - GEN
T1 - Transfer-less flexible and transparent high-κ/metal gate germanium devices on bulk silicon (100)
AU - Nassar, Joanna M.
AU - Hussain, Aftab M.
AU - Rojas, Jhonathan Prieto
AU - Hussain, Muhammad Mustafa
N1 - KAUST Repository Item: Exported on 2020-10-01
PY - 2014/8
Y1 - 2014/8
N2 - Flexible wearable electronics have been of great interest lately for the development of innovative future technology for various interactive applications in the field of consumer electronics and advanced healthcare, offering the promise of low-cost, lightweight, and multifunctionality. In the pursuit of this trend, high mobility channel materials need to be investigated on a flexible platform, for the development of flexible high performance devices. Germanium (Ge) is one of the most attractive alternatives for silicon (Si) for high-speed computational applications, due its higher hole and electron mobility. Thus, in this work we show a cost effective CMOS compatible process for transforming conventional rigid Ge metal oxide semiconductor capacitors (MOSCAPS) into a mechanically flexible and semi-transparent platform. Devices exhibit outstanding bendability with a bending radius of 0.24 cm, and semi-transparency up to 30 %, varying with respect to the diameter size of the release holes array.
AB - Flexible wearable electronics have been of great interest lately for the development of innovative future technology for various interactive applications in the field of consumer electronics and advanced healthcare, offering the promise of low-cost, lightweight, and multifunctionality. In the pursuit of this trend, high mobility channel materials need to be investigated on a flexible platform, for the development of flexible high performance devices. Germanium (Ge) is one of the most attractive alternatives for silicon (Si) for high-speed computational applications, due its higher hole and electron mobility. Thus, in this work we show a cost effective CMOS compatible process for transforming conventional rigid Ge metal oxide semiconductor capacitors (MOSCAPS) into a mechanically flexible and semi-transparent platform. Devices exhibit outstanding bendability with a bending radius of 0.24 cm, and semi-transparency up to 30 %, varying with respect to the diameter size of the release holes array.
UR - http://hdl.handle.net/10754/564972
UR - http://ieeexplore.ieee.org/document/6968081/
UR - http://www.scopus.com/inward/record.url?scp=84919479601&partnerID=8YFLogxK
U2 - 10.1109/NANO.2014.6968081
DO - 10.1109/NANO.2014.6968081
M3 - Conference contribution
SN - 9781479956227
SP - 176
EP - 179
BT - 14th IEEE International Conference on Nanotechnology
PB - Institute of Electrical and Electronics Engineers (IEEE)
ER -