Towards a digital sound reconstruction MEMS device: Characterization of a single PZT based piezoelectric actuator

Armando Arpys Arevalo Carreno, David Conchouso Gonzalez, David Castro, Nizar Jaber, Mohammad I. Younis, Ian G. Foulds

Research output: Chapter in Book/Report/Conference proceedingConference contribution

11 Scopus citations


In this paper we report the fabrication and characterization of a single piezoelectric actuator for digital sound reconstruction. This work is the first step towards the implementation of a true digital micro-loudspeaker by means of an array of acoustic actuators. These actuators consist of a flexible membrane fabricated using polyimide, which is actuated using a Lead-Zirconate-Titanate (PZT) piezoelectric ceramic layer working in the d31 actuation mode. The dimensions of the membrane are of 1mm diameter and 4μm in thickness, which is capable of being symmetrically actuated in both upward and downward directions, due to the back etch step releasing the membrane. Our electrical characterization shows an improvement in the polarization of the piezoelectric material after its final etch patterning step, and our mechanical characterization shows the natural modes of resonance of the stacked membrane. © 2015 IEEE.
Original languageEnglish (US)
Title of host publication10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
Number of pages6
ISBN (Print)9781467366953
StatePublished - Apr 2015

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