Torsion based universal MEMS logic device

Saad Ilyas, Armando Arpys Arevalo Carreno, Ernesto Bayes, Ian G. Foulds, Mohammad I. Younis

Research output: Contribution to journalArticlepeer-review

25 Scopus citations


In this work we demonstrate torsion based complementary MEMS logic device, which is capable, of performing INVERTER, AND, NAND, NOR, and OR gates using one physical structure within an operating range of 0-10 volts. It can also perform XOR and XNOR with one access inverter using the same structure with different electrical interconnects. The paper presents modeling, fabrication and experimental calculations of various performance features of the device including lifetime, power consumption and resonance frequency. The fabricated device is 535 μm by 150 μm with a gap of 1.92 μm and a resonant frequency of 6.51 kHz. The device is capable of performing the switching operation with a frequency of 1 kHz.
Original languageEnglish (US)
Pages (from-to)150-158
Number of pages9
JournalSensors and Actuators A: Physical
StatePublished - Nov 3 2015

Bibliographical note

KAUST Repository Item: Exported on 2020-10-01

ASJC Scopus subject areas

  • Instrumentation
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering
  • Condensed Matter Physics


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