Time dependent breakdown characteristics of parylene dielectric in metal-insulator-metal capacitors

S. Gowrisanker, M. A. Quevedo-Lopez, Husam Niman Alshareef, B. E. Gnade*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

6 Scopus citations


In this work, we present reliability results of MIM (Metal-Insulator-Metal) capacitors fabricated with parylene as the dielectric, deposited at room temperature. We have evaluated the time dependent dielectric breakdown (TDDB) of parylene-based MIM capacitors as a function of constant DC voltage stress, area and dielectric thickness of the capacitor. Mean-time-to-failure (MTTF) of parylene evaluated at different stress voltages shows a power law distribution over the applied voltage range and device area, with MTTF driven by the number of defects. Defect density in the parylene capacitors is also reported and is calculated to be ∼1.2 × 103 defects/cm2.

Original languageEnglish (US)
Pages (from-to)1024-1027
Number of pages4
JournalOrganic Electronics
Issue number5
StatePublished - Jan 1 2009


  • Organic dielectric
  • Organic thin film transistors
  • Parylene
  • Time-dependent-dielectric-breakdown

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Biomaterials
  • General Chemistry
  • Condensed Matter Physics
  • Materials Chemistry
  • Electrical and Electronic Engineering


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