Time dependent breakdown characteristics of parylene dielectric in metal-insulator-metal capacitors

S. Gowrisanker; M. A. Quevedo-Lopez; H. N. Alshareef; B. E. Gnade

doi:10.1016/j.orgel.2009.05.003

Time dependent breakdown characteristics of parylene dielectric in metal-insulator-metal capacitors

S. Gowrisanker, M. A. Quevedo-Lopez, H. N. Alshareef, B. E. Gnade^*

^*Corresponding author for this work

Physical Sciences and Engineering

Research output: Contribution to journal › Article › peer-review

6 Scopus citations

Abstract

In this work, we present reliability results of MIM (Metal-Insulator-Metal) capacitors fabricated with parylene as the dielectric, deposited at room temperature. We have evaluated the time dependent dielectric breakdown (TDDB) of parylene-based MIM capacitors as a function of constant DC voltage stress, area and dielectric thickness of the capacitor. Mean-time-to-failure (MTTF) of parylene evaluated at different stress voltages shows a power law distribution over the applied voltage range and device area, with MTTF driven by the number of defects. Defect density in the parylene capacitors is also reported and is calculated to be ∼1.2 × 10³ defects/cm².

Original language	English (US)
Pages (from-to)	1024-1027
Number of pages	4
Journal	Organic Electronics
Volume	10
Issue number	5
DOIs	https://doi.org/10.1016/j.orgel.2009.05.003
State	Published - Aug 2009

Keywords

Organic dielectric
Organic thin film transistors
Parylene
Time-dependent-dielectric-breakdown

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
General Chemistry
Condensed Matter Physics
Materials Chemistry
Electrical and Electronic Engineering
Biomaterials

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10.1016/j.orgel.2009.05.003

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@article{e003cd23241b4b5aa2cfce0740840245,

title = "Time dependent breakdown characteristics of parylene dielectric in metal-insulator-metal capacitors",

abstract = "In this work, we present reliability results of MIM (Metal-Insulator-Metal) capacitors fabricated with parylene as the dielectric, deposited at room temperature. We have evaluated the time dependent dielectric breakdown (TDDB) of parylene-based MIM capacitors as a function of constant DC voltage stress, area and dielectric thickness of the capacitor. Mean-time-to-failure (MTTF) of parylene evaluated at different stress voltages shows a power law distribution over the applied voltage range and device area, with MTTF driven by the number of defects. Defect density in the parylene capacitors is also reported and is calculated to be ∼1.2 × 103 defects/cm2.",

keywords = "Organic dielectric, Organic thin film transistors, Parylene, Time-dependent-dielectric-breakdown",

author = "S. Gowrisanker and Quevedo-Lopez, {M. A.} and Alshareef, {H. N.} and Gnade, {B. E.}",

year = "2009",

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doi = "10.1016/j.orgel.2009.05.003",

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issn = "1566-1199",

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T1 - Time dependent breakdown characteristics of parylene dielectric in metal-insulator-metal capacitors

AU - Gowrisanker, S.

AU - Quevedo-Lopez, M. A.

AU - Alshareef, H. N.

AU - Gnade, B. E.

PY - 2009/8

Y1 - 2009/8

N2 - In this work, we present reliability results of MIM (Metal-Insulator-Metal) capacitors fabricated with parylene as the dielectric, deposited at room temperature. We have evaluated the time dependent dielectric breakdown (TDDB) of parylene-based MIM capacitors as a function of constant DC voltage stress, area and dielectric thickness of the capacitor. Mean-time-to-failure (MTTF) of parylene evaluated at different stress voltages shows a power law distribution over the applied voltage range and device area, with MTTF driven by the number of defects. Defect density in the parylene capacitors is also reported and is calculated to be ∼1.2 × 103 defects/cm2.

AB - In this work, we present reliability results of MIM (Metal-Insulator-Metal) capacitors fabricated with parylene as the dielectric, deposited at room temperature. We have evaluated the time dependent dielectric breakdown (TDDB) of parylene-based MIM capacitors as a function of constant DC voltage stress, area and dielectric thickness of the capacitor. Mean-time-to-failure (MTTF) of parylene evaluated at different stress voltages shows a power law distribution over the applied voltage range and device area, with MTTF driven by the number of defects. Defect density in the parylene capacitors is also reported and is calculated to be ∼1.2 × 103 defects/cm2.

KW - Organic dielectric

KW - Organic thin film transistors

KW - Parylene

KW - Time-dependent-dielectric-breakdown

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U2 - 10.1016/j.orgel.2009.05.003

DO - 10.1016/j.orgel.2009.05.003

M3 - Article

AN - SCOPUS:67649236140

SN - 1566-1199

VL - 10

SP - 1024

EP - 1027

JO - Organic Electronics

JF - Organic Electronics

IS - 5

ER -

Time dependent breakdown characteristics of parylene dielectric in metal-insulator-metal capacitors

Abstract

Keywords

ASJC Scopus subject areas

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