@article{7f8a5aa5137141f597f6ff9a24d67c40,
title = "Three-dimensional micro- and nanostructuring by combination of nanoimprint and x-ray lithography",
author = "Massimo Tormen and Filippo Romanato and Matteo Altissimo and Luca Businaro and Patrizio Candeloro and {Di Fabrizio}, {Enzo M.}",
year = "2004",
doi = "10.1116/1.1688356",
language = "English (US)",
volume = "22",
pages = "766--770",
journal = "Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures",
issn = "1071-1023",
publisher = "AVS Science and Technology Society",
number = "2",
}