Thin film transistor (TFT) sensing elements fabricated in surface micromachined polymermems for a differential calorimetric flow sensor

S. H. Tsang; K. Simard; I. G. Foulds; H. Izadi; K. S. Karim; M. Parameswaran

doi:10.1109/MEMSYS.2009.4805449

Thin film transistor (TFT) sensing elements fabricated in surface micromachined polymermems for a differential calorimetric flow sensor

S. H. Tsang^*, K. Simard, I. G. Foulds, H. Izadi, K. S. Karim, M. Parameswaran

^*Corresponding author for this work

Computer, Electrical and Mathematical Sciences and Engineering

Research output: Contribution to journal › Conference article › peer-review

1 Scopus citations

Abstract

This paper presents the first process to allow theembedding of amorphous silicon thin film transistors in surface micromachined polymerMEMSS The presented polymerMEMs fabrication technique embeds hydrogenated amorphous silicon thin film transistors (α- Si:HL TFT) into polyimide for active sensing. An out-ofplane differential calorimetric flow sensor has been fabricated using this method to demonstrate the feasibility of this fabrication process. The calorimetric flow sensor uses the α-Si:H TFTs as active sensing elements and has a linear unamplified sensitivity of 2.2mV/(cm/s). This paper provides details for the fabrication process and reports on the design and functional results of calorimetric flow sensor fabricated by embedding α-Si:lH TFTs into polymerMEMS.

Original language	English (US)
Article number	4805449
Pages (from-to)	583-586
Number of pages	4
Journal	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
DOIs	https://doi.org/10.1109/MEMSYS.2009.4805449
State	Published - 2009
Event	22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009 - Sorrento, Italy Duration: Jan 25 2009 → Jan 29 2009

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

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10.1109/MEMSYS.2009.4805449

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Tsang, S. H., Simard, K., Foulds, I. G., Izadi, H., Karim, K. S., & Parameswaran, M. (2009). Thin film transistor (TFT) sensing elements fabricated in surface micromachined polymermems for a differential calorimetric flow sensor. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 583-586. Article 4805449. https://doi.org/10.1109/MEMSYS.2009.4805449

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title = "Thin film transistor (TFT) sensing elements fabricated in surface micromachined polymermems for a differential calorimetric flow sensor",

abstract = "This paper presents the first process to allow theembedding of amorphous silicon thin film transistors in surface micromachined polymerMEMSS The presented polymerMEMs fabrication technique embeds hydrogenated amorphous silicon thin film transistors (α- Si:HL TFT) into polyimide for active sensing. An out-ofplane differential calorimetric flow sensor has been fabricated using this method to demonstrate the feasibility of this fabrication process. The calorimetric flow sensor uses the α-Si:H TFTs as active sensing elements and has a linear unamplified sensitivity of 2.2mV/(cm/s). This paper provides details for the fabrication process and reports on the design and functional results of calorimetric flow sensor fabricated by embedding α-Si:lH TFTs into polymerMEMS.",

author = "Tsang, {S. H.} and K. Simard and Foulds, {I. G.} and H. Izadi and Karim, {K. S.} and M. Parameswaran",

year = "2009",

doi = "10.1109/MEMSYS.2009.4805449",

language = "English (US)",

pages = "583--586",

journal = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

issn = "1084-6999",

note = "22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009 ; Conference date: 25-01-2009 Through 29-01-2009",

}

Thin film transistor (TFT) sensing elements fabricated in surface micromachined polymermems for a differential calorimetric flow sensor. / Tsang, S. H.; Simard, K.; Foulds, I. G. et al.
In: Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2009, p. 583-586.

Research output: Contribution to journal › Conference article › peer-review

TY - JOUR

T1 - Thin film transistor (TFT) sensing elements fabricated in surface micromachined polymermems for a differential calorimetric flow sensor

AU - Tsang, S. H.

AU - Simard, K.

AU - Foulds, I. G.

AU - Izadi, H.

AU - Karim, K. S.

AU - Parameswaran, M.

PY - 2009

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N2 - This paper presents the first process to allow theembedding of amorphous silicon thin film transistors in surface micromachined polymerMEMSS The presented polymerMEMs fabrication technique embeds hydrogenated amorphous silicon thin film transistors (α- Si:HL TFT) into polyimide for active sensing. An out-ofplane differential calorimetric flow sensor has been fabricated using this method to demonstrate the feasibility of this fabrication process. The calorimetric flow sensor uses the α-Si:H TFTs as active sensing elements and has a linear unamplified sensitivity of 2.2mV/(cm/s). This paper provides details for the fabrication process and reports on the design and functional results of calorimetric flow sensor fabricated by embedding α-Si:lH TFTs into polymerMEMS.

AB - This paper presents the first process to allow theembedding of amorphous silicon thin film transistors in surface micromachined polymerMEMSS The presented polymerMEMs fabrication technique embeds hydrogenated amorphous silicon thin film transistors (α- Si:HL TFT) into polyimide for active sensing. An out-ofplane differential calorimetric flow sensor has been fabricated using this method to demonstrate the feasibility of this fabrication process. The calorimetric flow sensor uses the α-Si:H TFTs as active sensing elements and has a linear unamplified sensitivity of 2.2mV/(cm/s). This paper provides details for the fabrication process and reports on the design and functional results of calorimetric flow sensor fabricated by embedding α-Si:lH TFTs into polymerMEMS.

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DO - 10.1109/MEMSYS.2009.4805449

M3 - Conference article

AN - SCOPUS:65949121396

SN - 1084-6999

SP - 583

EP - 586

JO - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

JF - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

M1 - 4805449

T2 - 22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009

Y2 - 25 January 2009 through 29 January 2009

ER -

Thin film transistor (TFT) sensing elements fabricated in surface micromachined polymermems for a differential calorimetric flow sensor

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