In this study a theoretical and experimental investigation of the nonlinear response of an electrically actuated microbeam is performed. A mechanical model is proposed, which accounts for two common imperfections of microbeams, due to microfabrications, which are the compliant support conditions and the initially deformed profile. A computationally efficient single-mode reduced-order model is derived by combining the Ritz technique and the Padé approximation. Numerical simulations of the harmonic response of the device near primary resonance are shown illustrating nonlinear phenomena arising in the device response. Experimental investigation is conducted on a polysilicon imperfect microbeam confirming the simulation results. The concurrence between the theoretical results and the experimental data reveals that this model, while simple, is capable of properly capturing the response both at low and, especially, at higher electrodynamic voltages.
|Original language||English (US)|
|Journal||MATEC Web of Conferences|
|State||Published - Jan 1 2012|
|Event||1st International Conference on Structural Nonlinear Dynamics and Diagnosis, CSNDD 2012 - Marrakech, Morocco|
Duration: Apr 30 2012 → May 2 2012
ASJC Scopus subject areas
- Materials Science(all)