The static and dynamic behavior of MEMS arches under electrostatic actuation

Hassen M. Ouakad; Mohammad I. Younis; Fadi M. Alsaleem; Ronald Miles; Weili Cui

doi:10.1115/DETC2009-87024

The static and dynamic behavior of MEMS arches under electrostatic actuation

Hassen M. Ouakad, Mohammad I. Younis, Fadi M. Alsaleem, Ronald Miles, Weili Cui

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

9 Scopus citations

Abstract

In this paper, we investigate theoretically and experimentally the static and dynamic behaviors of electrostatically actuated clamped-clamped micromachined arches when excited by a DC load superimposed to an AC harmonic load. A Galerkin based reduced-order model is used to discretize the distributed-parameter model of the considered shallow arch. The natural frequencies of the arch are calculated for various values of DC voltages and initial rises of the arch. The forced vibration response of the arch to a combined DC and AC harmonic load is determined when excited near its fundamental natural frequency. For small DC and AC loads, a perturbation technique (the method of multiple scales) is also used. For large DC and AC, the reduced-order model equations are integrated numerically with time to get the arch dynamic response. The results show various nonlinear scenarios of transitions to snap-through and dynamic pull-in. The effect of rise is shown to have significant effect on the dynamical behavior of the MEMS arch. Experimental work is conducted to test polysilicon curved microbeam when excited by DC and AC loads. Experimental results on primary resonance and dynamic pull-in are shown and compared with the theoretical results.

Original language	English (US)
Title of host publication	Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference 2009, DETC2009
Pages	607-616
Number of pages	10
DOIs	https://doi.org/10.1115/DETC2009-87024
State	Published - 2010
Externally published	Yes
Event	2009 ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC2009 - San Diego, CA, United States Duration: Aug 30 2009 → Sep 2 2009

Publication series

Name	Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference 2009, DETC2009
Volume	6

Conference

Conference	2009 ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC2009
Country/Territory	United States
City	San Diego, CA
Period	08/30/09 → 09/2/09

ASJC Scopus subject areas

Electrical and Electronic Engineering
Hardware and Architecture
Computer Networks and Communications

Access to Document

10.1115/DETC2009-87024

Cite this

Ouakad, H. M., Younis, M. I., Alsaleem, F. M., Miles, R., & Cui, W. (2010). The static and dynamic behavior of MEMS arches under electrostatic actuation. In Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference 2009, DETC2009 (pp. 607-616). (Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference 2009, DETC2009; Vol. 6). https://doi.org/10.1115/DETC2009-87024

Ouakad, Hassen M. ; Younis, Mohammad I. ; Alsaleem, Fadi M. et al. / The static and dynamic behavior of MEMS arches under electrostatic actuation. Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference 2009, DETC2009. 2010. pp. 607-616 (Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference 2009, DETC2009).

@inproceedings{368d7a424e654b09b83aa519d684ed05,

title = "The static and dynamic behavior of MEMS arches under electrostatic actuation",

abstract = "In this paper, we investigate theoretically and experimentally the static and dynamic behaviors of electrostatically actuated clamped-clamped micromachined arches when excited by a DC load superimposed to an AC harmonic load. A Galerkin based reduced-order model is used to discretize the distributed-parameter model of the considered shallow arch. The natural frequencies of the arch are calculated for various values of DC voltages and initial rises of the arch. The forced vibration response of the arch to a combined DC and AC harmonic load is determined when excited near its fundamental natural frequency. For small DC and AC loads, a perturbation technique (the method of multiple scales) is also used. For large DC and AC, the reduced-order model equations are integrated numerically with time to get the arch dynamic response. The results show various nonlinear scenarios of transitions to snap-through and dynamic pull-in. The effect of rise is shown to have significant effect on the dynamical behavior of the MEMS arch. Experimental work is conducted to test polysilicon curved microbeam when excited by DC and AC loads. Experimental results on primary resonance and dynamic pull-in are shown and compared with the theoretical results.",

author = "Ouakad, {Hassen M.} and Younis, {Mohammad I.} and Alsaleem, {Fadi M.} and Ronald Miles and Weili Cui",

year = "2010",

doi = "10.1115/DETC2009-87024",

language = "English (US)",

isbn = "9780791849033",

series = "Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference 2009, DETC2009",

pages = "607--616",

booktitle = "Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference 2009, DETC2009",

note = "2009 ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC2009 ; Conference date: 30-08-2009 Through 02-09-2009",

}

Ouakad, HM, Younis, MI, Alsaleem, FM, Miles, R & Cui, W 2010, The static and dynamic behavior of MEMS arches under electrostatic actuation. in Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference 2009, DETC2009. Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference 2009, DETC2009, vol. 6, pp. 607-616, 2009 ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC2009, San Diego, CA, United States, 08/30/09. https://doi.org/10.1115/DETC2009-87024

The static and dynamic behavior of MEMS arches under electrostatic actuation. / Ouakad, Hassen M.; Younis, Mohammad I.; Alsaleem, Fadi M. et al.
Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference 2009, DETC2009. 2010. p. 607-616 (Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference 2009, DETC2009; Vol. 6).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - The static and dynamic behavior of MEMS arches under electrostatic actuation

AU - Ouakad, Hassen M.

AU - Younis, Mohammad I.

AU - Alsaleem, Fadi M.

AU - Miles, Ronald

AU - Cui, Weili

PY - 2010

Y1 - 2010

N2 - In this paper, we investigate theoretically and experimentally the static and dynamic behaviors of electrostatically actuated clamped-clamped micromachined arches when excited by a DC load superimposed to an AC harmonic load. A Galerkin based reduced-order model is used to discretize the distributed-parameter model of the considered shallow arch. The natural frequencies of the arch are calculated for various values of DC voltages and initial rises of the arch. The forced vibration response of the arch to a combined DC and AC harmonic load is determined when excited near its fundamental natural frequency. For small DC and AC loads, a perturbation technique (the method of multiple scales) is also used. For large DC and AC, the reduced-order model equations are integrated numerically with time to get the arch dynamic response. The results show various nonlinear scenarios of transitions to snap-through and dynamic pull-in. The effect of rise is shown to have significant effect on the dynamical behavior of the MEMS arch. Experimental work is conducted to test polysilicon curved microbeam when excited by DC and AC loads. Experimental results on primary resonance and dynamic pull-in are shown and compared with the theoretical results.

AB - In this paper, we investigate theoretically and experimentally the static and dynamic behaviors of electrostatically actuated clamped-clamped micromachined arches when excited by a DC load superimposed to an AC harmonic load. A Galerkin based reduced-order model is used to discretize the distributed-parameter model of the considered shallow arch. The natural frequencies of the arch are calculated for various values of DC voltages and initial rises of the arch. The forced vibration response of the arch to a combined DC and AC harmonic load is determined when excited near its fundamental natural frequency. For small DC and AC loads, a perturbation technique (the method of multiple scales) is also used. For large DC and AC, the reduced-order model equations are integrated numerically with time to get the arch dynamic response. The results show various nonlinear scenarios of transitions to snap-through and dynamic pull-in. The effect of rise is shown to have significant effect on the dynamical behavior of the MEMS arch. Experimental work is conducted to test polysilicon curved microbeam when excited by DC and AC loads. Experimental results on primary resonance and dynamic pull-in are shown and compared with the theoretical results.

UR - http://www.scopus.com/inward/record.url?scp=77953740860&partnerID=8YFLogxK

U2 - 10.1115/DETC2009-87024

DO - 10.1115/DETC2009-87024

M3 - Conference contribution

AN - SCOPUS:77953740860

SN - 9780791849033

T3 - Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference 2009, DETC2009

SP - 607

EP - 616

BT - Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference 2009, DETC2009

T2 - 2009 ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC2009

Y2 - 30 August 2009 through 2 September 2009

ER -

Ouakad HM, Younis MI, Alsaleem FM, Miles R, Cui W. The static and dynamic behavior of MEMS arches under electrostatic actuation. In Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference 2009, DETC2009. 2010. p. 607-616. (Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference 2009, DETC2009). doi: 10.1115/DETC2009-87024

The static and dynamic behavior of MEMS arches under electrostatic actuation

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