Abstract
In this paper the nucleation mechanism of the facing targets sputtering was studied. Data are presented of the variation of island-density changing with the deposition time and substrate temperature. A simplified treatment of nucleation and growth kinetics has been used to interpret the results.
Original language | English (US) |
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Pages (from-to) | 46-48 |
Number of pages | 3 |
Journal | Journal of Magnetism and Magnetic Materials |
Volume | 121 |
Issue number | 1-3 |
DOIs | |
State | Published - Mar 2 1993 |
Externally published | Yes |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics