The multilayered structure of ultrathin amorphous carbon films synthesized by filtered cathodic vacuum arc deposition

Engineering

• Amorphous Carbon 100%
• Buffer Layer 50%
• Deposited Film 25%
• Electron Energy 25%
• Energy Dissipation 25%
• Energy Shift 25%
• Excitation Energy 25%
• High Resolution 25%
• Interface Layer 50%
• Plasmon Excitation 25%
• Ray Photoelectron Spectroscopy 25%
• Silicon Substrate 25%
• Sp 3 Content 25%
• Substrate Bias 25%
• Surface Layer 25%
• Thick Layer 25%
• Transmissions 25%

Material Science

• Amorphous Carbon 100%
• Buffer Layer 50%
• Bulk Film 50%
• Carbon Films 100%
• Electron Energy Loss Spectrometry 25%
• High-Resolution Transmission Electron Microscopy 25%
• Photoemission Spectroscopy 25%

Keyphrases

• Filtered Cathodic Vacuum Arc Deposition (FCVAD) 100%
• Plasmon Excitation 25%