The impact of SiO2/SiN\rm x stack thickness on laser doping of silicon solar cell

Lujia Xu*, Klaus Weber, Andreas Fell, Ziv Hameiri, Sieu Pheng Phang, Xinbo Yang, Evan Franklin

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

9 Scopus citations


Laser doping of semiconductors has been the subject of intense research over the past decades. Previous work indicates that the use of SiO 2/SiN \rm x stacks instead of a single dielectric film as the anti-reflection coating and passivation layer results in laser doped lines with superior properties. In this paper, the impact of the SiN\rm x layer thickness in the SiO 2/SiN\rm x stacks on the properties of laser doped lines is investigated through resistance measurements of the laser doped line and the silicon-metal contact and the doping profile near the edge of the dielectric window, the latter being an important factor in determining the likelihood of high recombination or even shunting from the subsequent metallization process. Fundamentally, a problem of exposed and undoped silicon near the dielectric window is identified for most of the investigated parameter range. However, optimization of the laser parameters and dielectric film conditions is shown to be capable of preventing or at least minimizing this problem. The results indicate that for the used laser system, samples with thick dielectric stack processed using a low pulse energy and pulse distance yield the most favorable properties, such as low line resistance and low contact resistivity. Under these conditions, the laser doped regions laterally extend underneath the dielectric films, thus reducing the likelihood of high surface recombination.

Original languageEnglish (US)
Article number6714398
Pages (from-to)594-600
Number of pages7
JournalIEEE Journal of Photovoltaics
Issue number2
StatePublished - Mar 2014
Externally publishedYes


  • Dielectric films stack
  • laser doping
  • secondary electron microscopy dopant contrast imaging (SEMDCI)
  • transfer length method (TLM)

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering


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