The growth of SiGe quantum rings in Au thin films on epitaxial SiGe on silicon

J. H. He, Y. L. Chueh, W. W. Wu, S. W. Lee, L. J. Chen*, L. J. Chou

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

9 Scopus citations


Self-assembled SiGe quantum rings (QRs) on Si0.8Ge0.2 substrate has been formed by thermal annealing of the samples with capping Au thin films at 1100°C in N2 ambient. Miniature quantum rings have a narrow distribution of diameter and height of 27.9±1.7 and 1.53±0.10 run, respectively. The formation of quantum rings was found to be mediated by the Au nanoparticles. As the size of Au nanoparticles can be adjusted, the method promises to be an effective technique to produce high density, uniform in size quantum rings.

Original languageEnglish (US)
Pages (from-to)478-482
Number of pages5
JournalThin Solid Films
Issue numberSPEC. ISS.
StatePublished - Dec 22 2004
Externally publishedYes


  • Nanorings
  • Quantum rings
  • Self-assembly
  • SiGe

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Metals and Alloys
  • Materials Chemistry
  • Surfaces, Coatings and Films
  • Surfaces and Interfaces


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