The effect of squeeze-film damping on suppressing the shock response of MEMS

Hadi Yagubizade; Mohammad I. Younis; Ghader Rezazadeh

doi:10.1115/IMECE2009-12433

The effect of squeeze-film damping on suppressing the shock response of MEMS

Hadi Yagubizade^*, Mohammad I. Younis, Ghader Rezazadeh

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

This paper presents an investigation into the response of a clamped-c lamped microbeam to mechanical shock under the effect of squeeze-film damping (SQFD). In this work, we solve simultaneously the nonlinear Reynolds equation, to model squeeze-film damping, coupled with a nonlinear Euler- Bernoulli beam equation. A Galerkin-based reduced-order model and a finite-deference method (FDM) are utilized for the solid domain and for the fluid domain, respectively. Several results showing the effect of gas pressure on the response of the microbeams are shown. Comparison with the results of a multi- physics nonlinear finite-element model is presented. The results indicate that squeeze-film damping has more significant effect on the response of microstructures in the dynamic shock loads compared to the quasi-static shock loads.

Original language	English (US)
Title of host publication	Proceedings of the ASME International Mechanical Engineering Congress and Exposition 2009, IMECE 2009
Publisher	American Society of Mechanical Engineers (ASME)
Pages	303-308
Number of pages	6
Volume	12
Edition	PART A
ISBN (Print)	9780791843857
DOIs	https://doi.org/10.1115/IMECE2009-12433
State	Published - 2010
Externally published	Yes
Event	ASME 2009 International Mechanical Engineering Congress and Exposition, IMECE2009 - Lake Buena Vista, FL, United States Duration: Nov 13 2009 → Nov 19 2009

Other

Other	ASME 2009 International Mechanical Engineering Congress and Exposition, IMECE2009
Country/Territory	United States
City	Lake Buena Vista, FL
Period	11/13/09 → 11/19/09

ASJC Scopus subject areas

Mechanical Engineering

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10.1115/IMECE2009-12433

Cite this

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title = "The effect of squeeze-film damping on suppressing the shock response of MEMS",

abstract = "This paper presents an investigation into the response of a clamped-c lamped microbeam to mechanical shock under the effect of squeeze-film damping (SQFD). In this work, we solve simultaneously the nonlinear Reynolds equation, to model squeeze-film damping, coupled with a nonlinear Euler- Bernoulli beam equation. A Galerkin-based reduced-order model and a finite-deference method (FDM) are utilized for the solid domain and for the fluid domain, respectively. Several results showing the effect of gas pressure on the response of the microbeams are shown. Comparison with the results of a multi- physics nonlinear finite-element model is presented. The results indicate that squeeze-film damping has more significant effect on the response of microstructures in the dynamic shock loads compared to the quasi-static shock loads.",

author = "Hadi Yagubizade and Younis, {Mohammad I.} and Ghader Rezazadeh",

year = "2010",

doi = "10.1115/IMECE2009-12433",

language = "English (US)",

isbn = "9780791843857",

volume = "12",

pages = "303--308",

booktitle = "Proceedings of the ASME International Mechanical Engineering Congress and Exposition 2009, IMECE 2009",

publisher = "American Society of Mechanical Engineers (ASME)",

edition = "PART A",

note = "ASME 2009 International Mechanical Engineering Congress and Exposition, IMECE2009 ; Conference date: 13-11-2009 Through 19-11-2009",

}

Yagubizade, H, Younis, MI & Rezazadeh, G 2010, The effect of squeeze-film damping on suppressing the shock response of MEMS. in Proceedings of the ASME International Mechanical Engineering Congress and Exposition 2009, IMECE 2009. PART A edn, vol. 12, American Society of Mechanical Engineers (ASME), pp. 303-308, ASME 2009 International Mechanical Engineering Congress and Exposition, IMECE2009, Lake Buena Vista, FL, United States, 11/13/09. https://doi.org/10.1115/IMECE2009-12433

The effect of squeeze-film damping on suppressing the shock response of MEMS. / Yagubizade, Hadi; Younis, Mohammad I.; Rezazadeh, Ghader.
Proceedings of the ASME International Mechanical Engineering Congress and Exposition 2009, IMECE 2009. Vol. 12 PART A. ed. American Society of Mechanical Engineers (ASME), 2010. p. 303-308.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - The effect of squeeze-film damping on suppressing the shock response of MEMS

AU - Yagubizade, Hadi

AU - Younis, Mohammad I.

AU - Rezazadeh, Ghader

PY - 2010

Y1 - 2010

N2 - This paper presents an investigation into the response of a clamped-c lamped microbeam to mechanical shock under the effect of squeeze-film damping (SQFD). In this work, we solve simultaneously the nonlinear Reynolds equation, to model squeeze-film damping, coupled with a nonlinear Euler- Bernoulli beam equation. A Galerkin-based reduced-order model and a finite-deference method (FDM) are utilized for the solid domain and for the fluid domain, respectively. Several results showing the effect of gas pressure on the response of the microbeams are shown. Comparison with the results of a multi- physics nonlinear finite-element model is presented. The results indicate that squeeze-film damping has more significant effect on the response of microstructures in the dynamic shock loads compared to the quasi-static shock loads.

AB - This paper presents an investigation into the response of a clamped-c lamped microbeam to mechanical shock under the effect of squeeze-film damping (SQFD). In this work, we solve simultaneously the nonlinear Reynolds equation, to model squeeze-film damping, coupled with a nonlinear Euler- Bernoulli beam equation. A Galerkin-based reduced-order model and a finite-deference method (FDM) are utilized for the solid domain and for the fluid domain, respectively. Several results showing the effect of gas pressure on the response of the microbeams are shown. Comparison with the results of a multi- physics nonlinear finite-element model is presented. The results indicate that squeeze-film damping has more significant effect on the response of microstructures in the dynamic shock loads compared to the quasi-static shock loads.

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BT - Proceedings of the ASME International Mechanical Engineering Congress and Exposition 2009, IMECE 2009

PB - American Society of Mechanical Engineers (ASME)

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Y2 - 13 November 2009 through 19 November 2009

ER -

The effect of squeeze-film damping on suppressing the shock response of MEMS

Abstract

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