Temperature dependence of the crystalline quality of AlN layer grown on sapphire substrates by metalorganic chemical vapor deposition

Xiao Hang Li*, Yong O. Wei, Shuo Wang, Hongen Xie, Tsung Ting Kao, Md Mahbub Satter, Shyh Chiang Shen, P. Douglas Yoder, Theeradetch Detchprohm, Russell D. Dupuis, Alec M. Fischer, Fernando A. Ponce

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

35 Scopus citations

Fingerprint

Dive into the research topics of 'Temperature dependence of the crystalline quality of AlN layer grown on sapphire substrates by metalorganic chemical vapor deposition'. Together they form a unique fingerprint.

Engineering

Biochemistry, Genetics and Molecular Biology

Chemistry

Physics

Material Science