@article{f1ca769c0c9e4755ba22cec174478be8,
title = "Technique for preventing stiction and notching effect on silicon-on-insulator microstructure",
author = "J. Li and Zhang, {Q. X.} and Liu, {A. Q.} and Goh, {W. L.} and J. Ahn",
year = "2003",
doi = "10.1116/1.1623509",
language = "English (US)",
volume = "21",
pages = "2530--2539",
journal = "Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures",
issn = "1071-1023",
publisher = "AVS Science and Technology Society",
number = "6",
}