Technique for preventing stiction and notching effect on silicon-on-insulator microstructure

J. Li; Q. X. Zhang; A. Q. Liu; W. L. Goh; J. Ahn

doi:10.1116/1.1623509

Technique for preventing stiction and notching effect on silicon-on-insulator microstructure

J. Li, Q. X. Zhang, A. Q. Liu^*, W. L. Goh, J. Ahn

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

44 Scopus citations

Original language	English (US)
Pages (from-to)	2530-2539
Number of pages	10
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	21
Issue number	6
DOIs	https://doi.org/10.1116/1.1623509
State	Published - 2003
Externally published	Yes

ASJC Scopus subject areas

Condensed Matter Physics
Electrical and Electronic Engineering

Access to Document

10.1116/1.1623509

Cite this

@article{f1ca769c0c9e4755ba22cec174478be8,

title = "Technique for preventing stiction and notching effect on silicon-on-insulator microstructure",

author = "J. Li and Zhang, {Q. X.} and Liu, {A. Q.} and Goh, {W. L.} and J. Ahn",

year = "2003",

doi = "10.1116/1.1623509",

language = "English (US)",

volume = "21",

pages = "2530--2539",

journal = "Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures",

issn = "1071-1023",

number = "6",

}

TY - JOUR

T1 - Technique for preventing stiction and notching effect on silicon-on-insulator microstructure

AU - Li, J.

AU - Zhang, Q. X.

AU - Liu, A. Q.

AU - Goh, W. L.

AU - Ahn, J.

PY - 2003

Y1 - 2003

UR - http://www.scopus.com/inward/record.url?scp=0942289265&partnerID=8YFLogxK

U2 - 10.1116/1.1623509

DO - 10.1116/1.1623509

M3 - Article

AN - SCOPUS:0942289265

SN - 1071-1023

VL - 21

SP - 2530

EP - 2539

JO - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

JF - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

IS - 6

ER -

Technique for preventing stiction and notching effect on silicon-on-insulator microstructure

ASJC Scopus subject areas

Access to Document

Other files and links

Cite this