Technique for preventing stiction and notching effect on silicon-on-insulator microstructure

J. Li, Q. X. Zhang, A. Q. Liu*, W. L. Goh, J. Ahn

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

46 Scopus citations
Original languageEnglish (US)
Pages (from-to)2530-2539
Number of pages10
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume21
Issue number6
DOIs
StatePublished - 2003
Externally publishedYes

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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