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Tailoring silica nanotribology for CMP slurry optimization: Ca2+ cation competition in C12TAB mediated lubrication
Ivan U. Vakarelski, Scott C. Brown, G. Bahar Basim, Yakov I. Rabinovich, Brij M. Moudgil
Research output: Contribution to journal › Article › peer-review
14
Scopus
citations