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Syntheses and structures of novel hafnium chloroamido mono-amidinate and mono-guanidinate as precursors for HfO2 thin film
Mohamad Eleter, L. G. Hubert-Pfalzgraf, Stéphane Daniele*, Guillaume Pilet, Bernand Tinant
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
15
Scopus
citations