The reactions between HfCl2[N(SiMe3) 2]2 and one or two equivalents of [iPrNC(Me) NiPr]Li and iPr-NCN-iPr, at room temperature in toluene, gave the novel chloroamido-amidinato-hafnium HfCl[N(SiMe 3)2]2[iPrNC(Me)NiPr] (1) and chloroamido-guanidinato-hafnium HfCl2[N(SiMe3) 2][iPrNC(N(SiMe3)2)NiPr] (2) compounds, respectively. Compounds 1 and 2 were characterized by NMR and X-ray single crystal diffraction analysis. Their reaction towards alcohol was studied in order to check the dependency between molecular structure and HfO2 Atomic Layer Deposition (ALD) specifications.
|Original language||English (US)|
|Number of pages||5|
|State||Published - Aug 11 2010|
ASJC Scopus subject areas
- Physical and Theoretical Chemistry
- Inorganic Chemistry
- Materials Chemistry