Surface roughness parameters measurements by Digital Holographic Mcroscopy (DHM)

Frédéric Montfort; Yves Emery; Eduardo Solanas; Etienne Cuche; Nicolas Aspert; Pierre Marquet; Claude Joris; Jonas Kühn; Christian Depeursing

doi:10.1117/12.716113

Surface roughness parameters measurements by Digital Holographic Mcroscopy (DHM)

Frédéric Montfort^*, Yves Emery, Eduardo Solanas, Etienne Cuche, Nicolas Aspert, Pierre Marquet, Claude Joris, Jonas Kühn, Christian Depeursing

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

16 Scopus citations

Abstract

Digital Holographic Microscopes (DHM) allows the capture of all the information necessary to provide 3D phase measurements with a nanometer vertical resolution in a single image acquisition. DHM images provide measurements of the surface topography which can be used for surface analysis, roughness measurements for example. In this paper we present roughness measurements on micro-balls of different sizes for which numerical procedures are applied for form factor and waviness removal. DHM thus permits quantitative measurements of the roughness on a 2 dimensional area allowing enlarged information compared to common profilometers. Mean roughness of 5 to 30 nm are measured and compared to values obtained by a profilometer.

Original language	English (US)
Title of host publication	Third International Symposium on Precision Mechanical Measurements
DOIs	https://doi.org/10.1117/12.716113
State	Published - 2006
Externally published	Yes
Event	Third International Symposium on Precision Mechanical Measurements - Xinjiang, China Duration: Aug 2 2006 → Aug 6 2006

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	6280 I
ISSN (Print)	0277-786X

Other

Other	Third International Symposium on Precision Mechanical Measurements
Country/Territory	China
City	Xinjiang
Period	08/2/06 → 08/6/06

Keywords

3D optical topography
Digital holography
Roughness measurements
Surface measurements

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

Access to Document

10.1117/12.716113

Cite this

Montfort, F., Emery, Y., Solanas, E., Cuche, E., Aspert, N., Marquet, P., Joris, C., Kühn, J., & Depeursing, C. (2006). Surface roughness parameters measurements by Digital Holographic Mcroscopy (DHM). In Third International Symposium on Precision Mechanical Measurements Article 62800V (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 6280 I). https://doi.org/10.1117/12.716113

@inproceedings{14dea36214f74a828020ac74bb5452da,

title = "Surface roughness parameters measurements by Digital Holographic Mcroscopy (DHM)",

abstract = "Digital Holographic Microscopes (DHM) allows the capture of all the information necessary to provide 3D phase measurements with a nanometer vertical resolution in a single image acquisition. DHM images provide measurements of the surface topography which can be used for surface analysis, roughness measurements for example. In this paper we present roughness measurements on micro-balls of different sizes for which numerical procedures are applied for form factor and waviness removal. DHM thus permits quantitative measurements of the roughness on a 2 dimensional area allowing enlarged information compared to common profilometers. Mean roughness of 5 to 30 nm are measured and compared to values obtained by a profilometer.",

keywords = "3D optical topography, Digital holography, Roughness measurements, Surface measurements",

author = "Fr{\'e}d{\'e}ric Montfort and Yves Emery and Eduardo Solanas and Etienne Cuche and Nicolas Aspert and Pierre Marquet and Claude Joris and Jonas K{\"u}hn and Christian Depeursing",

year = "2006",

doi = "10.1117/12.716113",

language = "English (US)",

isbn = "0819463515",

series = "Proceedings of SPIE - The International Society for Optical Engineering",

booktitle = "Third International Symposium on Precision Mechanical Measurements",

note = "Third International Symposium on Precision Mechanical Measurements ; Conference date: 02-08-2006 Through 06-08-2006",

}

Montfort, F, Emery, Y, Solanas, E, Cuche, E, Aspert, N, Marquet, P, Joris, C, Kühn, J & Depeursing, C 2006, Surface roughness parameters measurements by Digital Holographic Mcroscopy (DHM). in Third International Symposium on Precision Mechanical Measurements., 62800V, Proceedings of SPIE - The International Society for Optical Engineering, vol. 6280 I, Third International Symposium on Precision Mechanical Measurements, Xinjiang, China, 08/2/06. https://doi.org/10.1117/12.716113

Surface roughness parameters measurements by Digital Holographic Mcroscopy (DHM). / Montfort, Frédéric; Emery, Yves; Solanas, Eduardo et al.
Third International Symposium on Precision Mechanical Measurements. 2006. 62800V (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 6280 I).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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T1 - Surface roughness parameters measurements by Digital Holographic Mcroscopy (DHM)

AU - Montfort, Frédéric

AU - Emery, Yves

AU - Solanas, Eduardo

AU - Cuche, Etienne

AU - Aspert, Nicolas

AU - Marquet, Pierre

AU - Joris, Claude

AU - Kühn, Jonas

AU - Depeursing, Christian

PY - 2006

Y1 - 2006

N2 - Digital Holographic Microscopes (DHM) allows the capture of all the information necessary to provide 3D phase measurements with a nanometer vertical resolution in a single image acquisition. DHM images provide measurements of the surface topography which can be used for surface analysis, roughness measurements for example. In this paper we present roughness measurements on micro-balls of different sizes for which numerical procedures are applied for form factor and waviness removal. DHM thus permits quantitative measurements of the roughness on a 2 dimensional area allowing enlarged information compared to common profilometers. Mean roughness of 5 to 30 nm are measured and compared to values obtained by a profilometer.

AB - Digital Holographic Microscopes (DHM) allows the capture of all the information necessary to provide 3D phase measurements with a nanometer vertical resolution in a single image acquisition. DHM images provide measurements of the surface topography which can be used for surface analysis, roughness measurements for example. In this paper we present roughness measurements on micro-balls of different sizes for which numerical procedures are applied for form factor and waviness removal. DHM thus permits quantitative measurements of the roughness on a 2 dimensional area allowing enlarged information compared to common profilometers. Mean roughness of 5 to 30 nm are measured and compared to values obtained by a profilometer.

KW - 3D optical topography

KW - Digital holography

KW - Roughness measurements

KW - Surface measurements

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DO - 10.1117/12.716113

M3 - Conference contribution

AN - SCOPUS:33846137982

SN - 0819463515

SN - 9780819463517

T3 - Proceedings of SPIE - The International Society for Optical Engineering

BT - Third International Symposium on Precision Mechanical Measurements

T2 - Third International Symposium on Precision Mechanical Measurements

Y2 - 2 August 2006 through 6 August 2006

ER -

Surface roughness parameters measurements by Digital Holographic Mcroscopy (DHM)

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