Surface profile-controlled close-packed Si nanorod arrays for self-cleaning antireflection coatings

Yi Ruei Lin*, Hsin Ping Wang, Chin An Lin, Jr Hau He

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

51 Scopus citations


We demonstrate the fabrication of surface profile-controlled close-packed Si nanorod arrays (NRAs), using a scalable and integrated circuit compatible process combining colloidal lithography and reactive ion etching. Si NRAs exhibit broadband, omnidirectional, and polarization-insensitive antireflection (AR) properties and enhance the hydrophobicity. The effect of surface profiles of periodic NRAs on the AR and hydrophobicity was investigated systematically. The Si NRAs function as both self-cleaning and AR layers, which offer a promising approach to enhance the solar cell energy conversion efficiency.

Original languageEnglish (US)
Article number114310
JournalJournal of Applied Physics
Issue number11
StatePublished - 2009
Externally publishedYes

Bibliographical note

Funding Information:
The research was supported by the National Science Council (Grant Nos. NSC 96-2112-M-002-038-MY3 and NSC 96-2622-M-002-002-CC3) and the Aim for Top University Project from the Ministry of Education.

ASJC Scopus subject areas

  • General Physics and Astronomy


Dive into the research topics of 'Surface profile-controlled close-packed Si nanorod arrays for self-cleaning antireflection coatings'. Together they form a unique fingerprint.

Cite this