X-ray photoelectron spectroscopy (XPS) results are presented on a series of alkali-doped and undoped TiO2 films prepared by the sol-gel technique. TiO2 films are deposited onto Al2O3 and quartz substrates, using titanium isopropylalkoxide as the prescursor, by dip-coating from the appropriate solutions. After dipping, the films are dried at 100 °C for one day and then heated to 300 °C for 30 min. The surface composition of the films is discussed, and the effects of Li, Na and K doping are compared. The effect of doping on the humidity-sensitive electrical properties of the films is evaluated by measuring the current flowing at various relative-humidity values upon application of a constant d.c. voltage.
|Original language||English (US)|
|Number of pages||3|
|Journal||Sensors and Actuators: B. Chemical|
|State||Published - Apr 1995|
Bibliographical noteFunding Information:
This work was supported by the National Research Council of Italy (CNR), under the auspices of the Targeted Project ‘Special Materials for Advanced Technologies’.
- Humidity sensors
- X-ray photoelectron spectroscopy
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Surfaces, Coatings and Films
- Metals and Alloys
- Electrical and Electronic Engineering
- Materials Chemistry