Surface chemistry of Ru: Relevance to optics lifetime in EUVL

R. Wasielewski, B. V. Yakshinskiy, Mohamed Nejib Hedhili, A. Ciszewski, T. E. Madey*

*Corresponding author for this work

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

    17 Scopus citations

    Fingerprint

    Dive into the research topics of 'Surface chemistry of Ru: Relevance to optics lifetime in EUVL'. Together they form a unique fingerprint.

    INIS

    Material Science

    Chemical Engineering

    Chemistry