@inproceedings{4a984d82f7e94e259eb56a2e2f156730,
title = "Subharmonic excitation for electrically actuated microbeams",
abstract = "We present analysis of the global dynamics of electrically actuated microbeams under subharmonic excitation. The microbeams are excited by a DC electrostatic force and an AC harmonic force with a frequency tuned near twice their fundamental natural frequencies. We show that the dynamic pull-in instability can occur in this case for an electric load much lower than that predicted with static analysis and the same order-of-magnitude as that predicted in the case of primary-resonance excitation. We show that, once the subharmonic resonance is activated, all frequency-response curves reach pull-in, regardless of the magnitude of the AC forcing. Our results show a limited influence of the quality factor on the frequency response. This result and the fact that the frequency-response curves have very steep passband-to-stopband transitions make the combination of a DC voltage and a subhormonic of order one-half a promising candidate for designing improved high-sensitive RF MEMS filters.",
author = "Nayfeh, {Ali H.} and Younis, {Mohammad I.}",
year = "2005",
doi = "10.1115/detc2005-84144",
language = "English (US)",
isbn = "0791847381",
series = "Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference - DETC2005",
publisher = "American Society of Mechanical Engineers",
pages = "391--396",
booktitle = "Proc. of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conferences - DETC2005",
note = "DETC2005: ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference ; Conference date: 24-09-2005 Through 28-09-2005",
}