Sub-15 nm nano-pattern generation by spacer width control for high density precisely positioned self-assembled device nanomanufacturing

Jhonathan Prieto Rojas, Muhammad Mustafa Hussain

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Scopus citations

Fingerprint

Dive into the research topics of 'Sub-15 nm nano-pattern generation by spacer width control for high density precisely positioned self-assembled device nanomanufacturing'. Together they form a unique fingerprint.

Keyphrases

Engineering

Chemical Engineering

Material Science