Fingerprint
Dive into the research topics of 'SU-8 surface-micromachining process utilizing PMGI as a sacrificial material'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
SU-8 surface-micromachining process utilizing PMGI as a sacrificial material
I. G. Foulds, R. W. Johnstone, M. Parameswaran
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review
8
Scopus
citations