SU-8 surface-micromachining process utilizing PMGI as a sacrificial material

I. G. Foulds; R. W. Johnstone; M. Parameswaran

doi:10.1109/memsys.2007.4432971

SU-8 surface-micromachining process utilizing PMGI as a sacrificial material

I. G. Foulds, R. W. Johnstone, M. Parameswaran

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

8 Scopus citations

Abstract

This work presents a novel surface micromachining process based on the SU-8 polymer that uses the resist PMGI as a sacrificial layer as well as a lift-off resist for metal patterning. The process is capable of independent patterning of the structural and metal layers which decouples the mechanical and electrical properties of the resulting structures. The process uses inexpensive equipment and materials and can be completed in a single day, making this process ideal for proof of concept prototyping.

Original language	English (US)
Title of host publication	Proceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	291-294
Number of pages	4
ISBN (Print)	1424409519, 9781424409518
DOIs	https://doi.org/10.1109/memsys.2007.4432971
State	Published - 2007
Externally published	Yes
Event	20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007 - Kobe, Japan Duration: Jan 21 2007 → Jan 25 2007

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Other

Other	20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007
Country/Territory	Japan
City	Kobe
Period	01/21/07 → 01/25/07

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/memsys.2007.4432971

Cite this

Foulds, I. G., Johnstone, R. W., & Parameswaran, M. (2007). SU-8 surface-micromachining process utilizing PMGI as a sacrificial material. In Proceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007 (pp. 291-294). Article 4432971 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/memsys.2007.4432971

Foulds, I. G. ; Johnstone, R. W. ; Parameswaran, M. / SU-8 surface-micromachining process utilizing PMGI as a sacrificial material. Proceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007. Institute of Electrical and Electronics Engineers Inc., 2007. pp. 291-294 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

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title = "SU-8 surface-micromachining process utilizing PMGI as a sacrificial material",

abstract = "This work presents a novel surface micromachining process based on the SU-8 polymer that uses the resist PMGI as a sacrificial layer as well as a lift-off resist for metal patterning. The process is capable of independent patterning of the structural and metal layers which decouples the mechanical and electrical properties of the resulting structures. The process uses inexpensive equipment and materials and can be completed in a single day, making this process ideal for proof of concept prototyping.",

author = "Foulds, {I. G.} and Johnstone, {R. W.} and M. Parameswaran",

year = "2007",

doi = "10.1109/memsys.2007.4432971",

language = "English (US)",

isbn = "1424409519",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

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booktitle = "Proceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007",

address = "United States",

note = "20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007 ; Conference date: 21-01-2007 Through 25-01-2007",

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Foulds, IG, Johnstone, RW & Parameswaran, M 2007, SU-8 surface-micromachining process utilizing PMGI as a sacrificial material. in Proceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007., 4432971, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Institute of Electrical and Electronics Engineers Inc., pp. 291-294, 20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007, Kobe, Japan, 01/21/07. https://doi.org/10.1109/memsys.2007.4432971

SU-8 surface-micromachining process utilizing PMGI as a sacrificial material. / Foulds, I. G.; Johnstone, R. W.; Parameswaran, M.
Proceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007. Institute of Electrical and Electronics Engineers Inc., 2007. p. 291-294 4432971 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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Foulds IG, Johnstone RW, Parameswaran M. SU-8 surface-micromachining process utilizing PMGI as a sacrificial material. In Proceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007. Institute of Electrical and Electronics Engineers Inc. 2007. p. 291-294. 4432971. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/memsys.2007.4432971

SU-8 surface-micromachining process utilizing PMGI as a sacrificial material

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