Studying the mechanism of hybrid nanoparticle EUV photoresists

Ben Zhang; Li Li; Jing Jiang; Mark Neisser; Jun Sung Chun; Christopher K. Ober; Emmanuel P. Giannelis

doi:10.1117/12.2085662

Studying the mechanism of hybrid nanoparticle EUV photoresists

Ben Zhang, Li Li, Jing Jiang, Mark Neisser, Jun Sung Chun, Christopher K. Ober, Emmanuel P. Giannelis

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

This work focuses on the investigation of dual tone patterning mechanism with hybrid inorganic/organic photoresists. Hafnium oxide (HfO2) modified with acrylic acid was prepared and the influence of electrolyte solutions as well as pH on its particle size change was investigated. The average particle size and zeta potential of the nanoparticles in different electrolyte solutions were measured. The results show that addition of different concentrations of electrolytes changed the hydrodynamic diameter of nanoparticles in water. Increased concentration of tetramethyl ammonium hydroxide (TMAH) caused the zeta potential of nanoparticles to change from positive to negative and its hydrodynamic diameter to increase from 40 nm to 165 nm. In addition, increasing concentration of triflic acid led to the decrease of particle size and zeta potential. © (2015) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.

Original language	English (US)
Title of host publication	Advances in Patterning Materials and Processes XXXII
Publisher	SPIE-Intl Soc Optical Eng
ISBN (Print)	9781628415278
DOIs	https://doi.org/10.1117/12.2085662
State	Published - Mar 23 2015
Externally published	Yes

Bibliographical note

KAUST Repository Item: Exported on 2020-10-01
Acknowledgements: The authors gratefully acknowledge SEMATECH for funding, as well as the Cornell Nanoscale Science and TechnologyFacility (CNF), and the KAUST-Cornell Center of Energy and Sustainability (KAUST_CU) for use of their facilities.
This publication acknowledges KAUST support, but has no KAUST affiliated authors.

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10.1117/12.2085662

Cite this

@inproceedings{d518f2890ebd46cf81aa5a6178707c1b,

title = "Studying the mechanism of hybrid nanoparticle EUV photoresists",

abstract = "This work focuses on the investigation of dual tone patterning mechanism with hybrid inorganic/organic photoresists. Hafnium oxide (HfO2) modified with acrylic acid was prepared and the influence of electrolyte solutions as well as pH on its particle size change was investigated. The average particle size and zeta potential of the nanoparticles in different electrolyte solutions were measured. The results show that addition of different concentrations of electrolytes changed the hydrodynamic diameter of nanoparticles in water. Increased concentration of tetramethyl ammonium hydroxide (TMAH) caused the zeta potential of nanoparticles to change from positive to negative and its hydrodynamic diameter to increase from 40 nm to 165 nm. In addition, increasing concentration of triflic acid led to the decrease of particle size and zeta potential. {\textcopyright} (2015) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.",

author = "Ben Zhang and Li Li and Jing Jiang and Mark Neisser and Chun, {Jun Sung} and Ober, {Christopher K.} and Giannelis, {Emmanuel P.}",

note = "KAUST Repository Item: Exported on 2020-10-01 Acknowledgements: The authors gratefully acknowledge SEMATECH for funding, as well as the Cornell Nanoscale Science and TechnologyFacility (CNF), and the KAUST-Cornell Center of Energy and Sustainability (KAUST_CU) for use of their facilities. This publication acknowledges KAUST support, but has no KAUST affiliated authors.",

year = "2015",

month = mar,

day = "23",

doi = "10.1117/12.2085662",

language = "English (US)",

isbn = "9781628415278",

booktitle = "Advances in Patterning Materials and Processes XXXII",

publisher = "SPIE-Intl Soc Optical Eng",

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TY - GEN

T1 - Studying the mechanism of hybrid nanoparticle EUV photoresists

AU - Zhang, Ben

AU - Li, Li

AU - Jiang, Jing

AU - Neisser, Mark

AU - Chun, Jun Sung

AU - Ober, Christopher K.

AU - Giannelis, Emmanuel P.

N1 - KAUST Repository Item: Exported on 2020-10-01 Acknowledgements: The authors gratefully acknowledge SEMATECH for funding, as well as the Cornell Nanoscale Science and TechnologyFacility (CNF), and the KAUST-Cornell Center of Energy and Sustainability (KAUST_CU) for use of their facilities. This publication acknowledges KAUST support, but has no KAUST affiliated authors.

PY - 2015/3/23

Y1 - 2015/3/23

N2 - This work focuses on the investigation of dual tone patterning mechanism with hybrid inorganic/organic photoresists. Hafnium oxide (HfO2) modified with acrylic acid was prepared and the influence of electrolyte solutions as well as pH on its particle size change was investigated. The average particle size and zeta potential of the nanoparticles in different electrolyte solutions were measured. The results show that addition of different concentrations of electrolytes changed the hydrodynamic diameter of nanoparticles in water. Increased concentration of tetramethyl ammonium hydroxide (TMAH) caused the zeta potential of nanoparticles to change from positive to negative and its hydrodynamic diameter to increase from 40 nm to 165 nm. In addition, increasing concentration of triflic acid led to the decrease of particle size and zeta potential. © (2015) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.

AB - This work focuses on the investigation of dual tone patterning mechanism with hybrid inorganic/organic photoresists. Hafnium oxide (HfO2) modified with acrylic acid was prepared and the influence of electrolyte solutions as well as pH on its particle size change was investigated. The average particle size and zeta potential of the nanoparticles in different electrolyte solutions were measured. The results show that addition of different concentrations of electrolytes changed the hydrodynamic diameter of nanoparticles in water. Increased concentration of tetramethyl ammonium hydroxide (TMAH) caused the zeta potential of nanoparticles to change from positive to negative and its hydrodynamic diameter to increase from 40 nm to 165 nm. In addition, increasing concentration of triflic acid led to the decrease of particle size and zeta potential. © (2015) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.

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UR - http://proceedings.spiedigitallibrary.org/proceeding.aspx?doi=10.1117/12.2085662

UR - http://www.scopus.com/inward/record.url?scp=85034758447&partnerID=8YFLogxK

U2 - 10.1117/12.2085662

DO - 10.1117/12.2085662

M3 - Conference contribution

SN - 9781628415278

BT - Advances in Patterning Materials and Processes XXXII

PB - SPIE-Intl Soc Optical Eng

ER -

Studying the mechanism of hybrid nanoparticle EUV photoresists

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