Study on the effect of size on InGaN red micro-LEDs

Ray-Hua Horng; Chun-Xin Ye; Po-Wei Chen; Daisuke Iida; Kazuhiro Ohkawa; Yuh-Renn Wu; Dong-Sing Wuu

doi:10.1038/s41598-022-05370-0

Study on the effect of size on InGaN red micro-LEDs

Ray-Hua Horng, Chun-Xin Ye, Po-Wei Chen, Daisuke Iida, Kazuhiro Ohkawa, Yuh-Renn Wu, Dong-Sing Wuu

Research output: Contribution to journal › Article › peer-review

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Abstract

In this research, five sizes (100 × 100, 75 × 75, 50 × 50, 25 × 25, 10 × 10 µm$^{2}$) of InGaN red micro-light emitting diode (LED) dies are produced using laser-based direct writing and maskless technology. It is observed that with increasing injection current, the smaller the size of the micro-LED, the more obvious the blue shift of the emission wavelength. When the injection current is increased from 0.1 to 1 mA, the emission wavelength of the 10 × 10 μm$^{2}$ micro-LED is shifted from 617.15 to 576.87 nm. The obvious blue shift is attributed to the stress release and high current density injection. Moreover, the output power density is very similar for smaller chip micro-LEDs at the same injection current density. This behavior is different from AlGaInP micro-LEDs. The sidewall defect is more easily repaired by passivation, which is similar to the behavior of blue micro-LEDs. The results indicate that the red InGaN epilayer structure provides an opportunity to realize the full color LEDs fabricated by GaN-based LEDs.

Original language	English (US)
Journal	Scientific Reports
Volume	12
Issue number	1
DOIs	https://doi.org/10.1038/s41598-022-05370-0 https://doi.org/10.21203/rs.3.rs-965149/v1
State	Published - Jan 25 2022

Bibliographical note

KAUST Repository Item: Exported on 2022-01-28
Acknowledgements: This work was supported by the Ministry of Science and Technology, Taiwan, under Grant Nos. MOST 110-2218-E-A49-012-MBK, 110-2622-8-009-018-SB, 109-2224-E-009-002,109-2221-E-009-143-MY3, 109-2634-F-009-028, 108-2628-E-002-010-MY3, 108-2622-E-009-009-CC2, 108-2618-E-009-031. We would like to thank Taiwan Semiconductor Research Institute for processing supporting.

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Cite this

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title = "Study on the effect of size on InGaN red micro-LEDs",

abstract = "In this research, five sizes (100 × 100, 75 × 75, 50 × 50, 25 × 25, 10 × 10 µm$^{2}$) of InGaN red micro-light emitting diode (LED) dies are produced using laser-based direct writing and maskless technology. It is observed that with increasing injection current, the smaller the size of the micro-LED, the more obvious the blue shift of the emission wavelength. When the injection current is increased from 0.1 to 1 mA, the emission wavelength of the 10 × 10 μm$^{2}$ micro-LED is shifted from 617.15 to 576.87 nm. The obvious blue shift is attributed to the stress release and high current density injection. Moreover, the output power density is very similar for smaller chip micro-LEDs at the same injection current density. This behavior is different from AlGaInP micro-LEDs. The sidewall defect is more easily repaired by passivation, which is similar to the behavior of blue micro-LEDs. The results indicate that the red InGaN epilayer structure provides an opportunity to realize the full color LEDs fabricated by GaN-based LEDs.",

author = "Ray-Hua Horng and Chun-Xin Ye and Po-Wei Chen and Daisuke Iida and Kazuhiro Ohkawa and Yuh-Renn Wu and Dong-Sing Wuu",

note = "KAUST Repository Item: Exported on 2022-01-28 Acknowledgements: This work was supported by the Ministry of Science and Technology, Taiwan, under Grant Nos. MOST 110-2218-E-A49-012-MBK, 110-2622-8-009-018-SB, 109-2224-E-009-002,109-2221-E-009-143-MY3, 109-2634-F-009-028, 108-2628-E-002-010-MY3, 108-2622-E-009-009-CC2, 108-2618-E-009-031. We would like to thank Taiwan Semiconductor Research Institute for processing supporting.",

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doi = "10.1038/s41598-022-05370-0",

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T1 - Study on the effect of size on InGaN red micro-LEDs

AU - Horng, Ray-Hua

AU - Ye, Chun-Xin

AU - Chen, Po-Wei

AU - Iida, Daisuke

AU - Ohkawa, Kazuhiro

AU - Wu, Yuh-Renn

AU - Wuu, Dong-Sing

N1 - KAUST Repository Item: Exported on 2022-01-28 Acknowledgements: This work was supported by the Ministry of Science and Technology, Taiwan, under Grant Nos. MOST 110-2218-E-A49-012-MBK, 110-2622-8-009-018-SB, 109-2224-E-009-002,109-2221-E-009-143-MY3, 109-2634-F-009-028, 108-2628-E-002-010-MY3, 108-2622-E-009-009-CC2, 108-2618-E-009-031. We would like to thank Taiwan Semiconductor Research Institute for processing supporting.

PY - 2022/1/25

Y1 - 2022/1/25

N2 - In this research, five sizes (100 × 100, 75 × 75, 50 × 50, 25 × 25, 10 × 10 µm$^{2}$) of InGaN red micro-light emitting diode (LED) dies are produced using laser-based direct writing and maskless technology. It is observed that with increasing injection current, the smaller the size of the micro-LED, the more obvious the blue shift of the emission wavelength. When the injection current is increased from 0.1 to 1 mA, the emission wavelength of the 10 × 10 μm$^{2}$ micro-LED is shifted from 617.15 to 576.87 nm. The obvious blue shift is attributed to the stress release and high current density injection. Moreover, the output power density is very similar for smaller chip micro-LEDs at the same injection current density. This behavior is different from AlGaInP micro-LEDs. The sidewall defect is more easily repaired by passivation, which is similar to the behavior of blue micro-LEDs. The results indicate that the red InGaN epilayer structure provides an opportunity to realize the full color LEDs fabricated by GaN-based LEDs.

AB - In this research, five sizes (100 × 100, 75 × 75, 50 × 50, 25 × 25, 10 × 10 µm$^{2}$) of InGaN red micro-light emitting diode (LED) dies are produced using laser-based direct writing and maskless technology. It is observed that with increasing injection current, the smaller the size of the micro-LED, the more obvious the blue shift of the emission wavelength. When the injection current is increased from 0.1 to 1 mA, the emission wavelength of the 10 × 10 μm$^{2}$ micro-LED is shifted from 617.15 to 576.87 nm. The obvious blue shift is attributed to the stress release and high current density injection. Moreover, the output power density is very similar for smaller chip micro-LEDs at the same injection current density. This behavior is different from AlGaInP micro-LEDs. The sidewall defect is more easily repaired by passivation, which is similar to the behavior of blue micro-LEDs. The results indicate that the red InGaN epilayer structure provides an opportunity to realize the full color LEDs fabricated by GaN-based LEDs.

UR - http://hdl.handle.net/10754/672842

UR - https://www.nature.com/articles/s41598-022-05370-0

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DO - 10.1038/s41598-022-05370-0

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C2 - 35079062

SN - 2045-2322

VL - 12

JO - Scientific Reports

JF - Scientific Reports

IS - 1

ER -

Study on the effect of size on InGaN red micro-LEDs

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