Steam-Assisted Chemical Vapor Deposition of Zeolitic Imidazolate Framework

Jing-Kai Huang, Noboru Saito, Yichen Cai, Yi Wan, Chia-Chin Cheng, Mengliu Li, Junjie Shi, Kaoru Tamada, Vincent Tung, Sean Li, Lain-Jong Li

Research output: Contribution to journalArticlepeer-review

27 Scopus citations


Direct growth of metal–organic frameworks (MOFs) on substrates is a prerequisite to incorporating them into functional platforms and microdevices. Nevertheless, available reports mostly rely on the solvent-based routes, typically altered from processes for powder synthesis which are obstacles to the nanofabrication. Besides, although few vapor-phase growth approaches were presented, the proposed procedures required multiple steps, such as matrix deposition and post-conversion, to obtain desired MOF films on substrates. Here, we demonstrate a steam-assisted chemical vapor deposition (CVD) method to directly synthesize highly crystalline ZIF-67 thin films at the temperature
Original languageEnglish (US)
Pages (from-to)485-491
Number of pages7
JournalACS Materials Letters
Issue number5
StatePublished - Apr 1 2020

Bibliographical note

KAUST Repository Item: Exported on 2020-10-01
Acknowledgements: The authors acknowledge the facilities, as well as the scientific and technical assistance, from the NSW Node of the Australian
National Fabrication Facility (ANFF) and the Research & Prototype Foundry Core Research Facility at the University of Sydney, part of the ANFF. The authors also thank the Electron Microscope Unit within the Mark Wainwright Analytical Centre at UNSW Sydney for the use of facilities. N.S. is grateful to the advanced graduate course on molecular systems for devices, a program for leading graduate schools, Kyushu University, Japan.


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