TY - GEN
T1 - Stabilizing the dynamics of electrostatic MEMS resonators using delayed feedback controller
AU - Alsaleem, Fadi M.
AU - Younis, Mohammad I.
PY - 2010
Y1 - 2010
N2 - We study the effect of delayed feedback controller on the dynamic stability of a MEMS resonator actuated with DC and AC voltages. We show that the delayed feedback controller, with a careful selection of its parameters, can be used to stabilize an originally unstable resonator operating in the escape (dynamic pull-in) frequency band. Also, the controller is shown to enhance the stability of the resonator near pull-in, where it experiences a strong fractal behavior. In both cases, the controller shows superior performance in rejecting disturbances. Experimental and theoretical results are presented to demonstrate the capability of the feedback controller to stabilize the performance of the capacitive resonator. A good agreement between simulation and experiment was achieved.
AB - We study the effect of delayed feedback controller on the dynamic stability of a MEMS resonator actuated with DC and AC voltages. We show that the delayed feedback controller, with a careful selection of its parameters, can be used to stabilize an originally unstable resonator operating in the escape (dynamic pull-in) frequency band. Also, the controller is shown to enhance the stability of the resonator near pull-in, where it experiences a strong fractal behavior. In both cases, the controller shows superior performance in rejecting disturbances. Experimental and theoretical results are presented to demonstrate the capability of the feedback controller to stabilize the performance of the capacitive resonator. A good agreement between simulation and experiment was achieved.
UR - http://www.scopus.com/inward/record.url?scp=77953744776&partnerID=8YFLogxK
U2 - 10.1115/DETC2009-86903
DO - 10.1115/DETC2009-86903
M3 - Conference contribution
AN - SCOPUS:77953744776
SN - 9780791849019
T3 - Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference 2009, DETC2009
SP - 1671
EP - 1677
BT - Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference 2009, DETC2009
T2 - 2009 ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC2009
Y2 - 30 August 2009 through 2 September 2009
ER -