Stabilization of electrostatic MEMS resonators using a delayed feedback controller

We present a study for the stabilization of a MEMS resonator actuated with DC and AC voltages using a delayed feedback controller. We show that the delayed feedback controller, with a careful selection of its parameters, can be used to stabilize an originally unstable resonator operating in the dynamic pull-in frequency band. Also, the controller is shown to enhance the stability of the resonator near pull-in, where it experiences a strong fractal behavior. In both cases, the controller shows superior performance in rejecting disturbances. Experimental and theoretical results are presented to demonstrate the capability of the feedback controller to stabilize the performance of a capacitive resonator. Good agreement between simulation and experiment is demonstrated.