Stabilization of electrostatic MEMS resonators using a delayed feedback controller

Fadi M. Alsaleem, Mohammad I. Younis

Research output: Contribution to journalArticlepeer-review

55 Scopus citations


We present a study for the stabilization of a MEMS resonator actuated with DC and AC voltages using a delayed feedback controller. We show that the delayed feedback controller, with a careful selection of its parameters, can be used to stabilize an originally unstable resonator operating in the dynamic pull-in frequency band. Also, the controller is shown to enhance the stability of the resonator near pull-in, where it experiences a strong fractal behavior. In both cases, the controller shows superior performance in rejecting disturbances. Experimental and theoretical results are presented to demonstrate the capability of the feedback controller to stabilize the performance of a capacitive resonator. Good agreement between simulation and experiment is demonstrated.

Original languageEnglish (US)
Article number035016
JournalSmart Materials and Structures
Issue number3
StatePublished - 2010
Externally publishedYes

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Mechanics of Materials
  • Signal Processing
  • Atomic and Molecular Physics, and Optics
  • Electrical and Electronic Engineering
  • General Materials Science
  • Civil and Structural Engineering


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