A comprehensive study of SrRuO3 thin films growth on (001) MgO substrates by pulsed laser deposition in a wide oxygen pressure range from 10 to 300 mTorr was carried out. The experimental results showed a correlation between the lattice constants, resistivity, and oxygen partial pressures used. Ru deficiency detected only in films deposited at lower oxygen pressures (
|Original language||English (US)|
|Number of pages||6|
|Journal||Journal of Materials Research|
|State||Published - Jan 8 2013|
Bibliographical noteKAUST Repository Item: Exported on 2020-10-01
Acknowledgements: We acknowledge the financial support from theEngineering and Physical Sciences Research Counciland the King Abdullah University of Science andTechnology.
This publication acknowledges KAUST support, but has no KAUST affiliated authors.