Sputter deposition of SrTiO3 thin films for voltage tunable capacitors

Mark V. Raymond*, Husam N. Al-Shareef, Duane B. Dimos, Nancy Missert, Carl H. Mueller, David Galt

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

6 Scopus citations


The electric field dependence of the dielectric constant of ferroelectric and related materials can be used to fabricate voltage tunable filters for microwave applications. In this study, the growth, structure, and dielectric properties of sputter deposited thin films will be discussed. In particular, SrTiO3 thin films were deposited onto (100)pc LaAlO3 and r-cut sapphire substrates using RF magnetron sputtering at elevated temperatures. The films deposited on LaAlO3 were highly (00) oriented possessing a cube-on-cube heteroepitaxial structure, while the films deposited directly on sapphire were polycrystalline. We have studied the influence of deposition conditions and post deposition annealing on the crystal quality, microstructure, and electrical properties. We find that post deposition annealing can significantly improve the tunability of heteroepitaxial films. The magnitude and tunability of the dielectric constant will be correlated with film crystalline quality and microstructure.

Original languageEnglish (US)
Pages (from-to)247-256
Number of pages10
JournalIntegrated Ferroelectrics
Issue number1-4
StatePublished - 1997
Externally publishedYes


  • Dielectric loss
  • Interdigital electrodes
  • Sputter deposition
  • SrTiO thin films
  • Tunable capacitors

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Control and Systems Engineering
  • Ceramics and Composites
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry


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