Solubility studies of inorganic–organic hybrid nanoparticle photoresists with different surface functional groups

Li Li, Souvik Chakrabarty, Jing Jiang, Ben Zhang, Christopher Ober, Emmanuel P. Giannelis

Research output: Contribution to journalArticlepeer-review

53 Scopus citations


© 2016 The Royal Society of Chemistry. The solubility behavior of Hf and Zr based hybrid nanoparticles with different surface ligands in different concentrations of photoacid generator as potential EUV photoresists was investigated in detail. The nanoparticles regardless of core or ligand chemistry have a hydrodynamic diameter of 2-3 nm and a very narrow size distribution in organic solvents. The Hansen solubility parameters for nanoparticles functionalized with IBA and 2MBA have the highest contribution from the dispersion interaction than those with tDMA and MAA, which show more polar character. The nanoparticles functionalized with unsaturated surface ligands showed more apparent solubility changes after exposure to DUV than those with saturated ones. The solubility differences after exposure are more pronounced for films containing a higher amount of photoacid generator. The work reported here provides material selection criteria and processing strategies for the design of high performance EUV photoresists.
Original languageEnglish (US)
Pages (from-to)1338-1343
Number of pages6
Issue number3
StatePublished - 2016
Externally publishedYes

Bibliographical note

KAUST Repository Item: Exported on 2020-10-01
Acknowledgements: The authors gratefully acknowledge funding support from SEMATECH and facilities support from Lawrence Berkeley National Laboratory (LBNL), Cornell Nanoscale Science and Technology (CNF), the Cornell Center for Materials Research (CCMR) and the KAUST-Cornell Center of Energy and Sustainability (KAUST-CU).
This publication acknowledges KAUST support, but has no KAUST affiliated authors.


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