Solid state MEMS devices on flexible and semi-transparent silicon (100) platform

Sally Ahmed, Aftab M. Hussain, Jhonathan Prieto Rojas, Muhammad Mustafa Hussain

Research output: Chapter in Book/Report/Conference proceedingConference contribution

12 Scopus citations


We report fabrication of MEMS thermal actuators on flexible and semi-transparent silicon fabric released from bulk silicon (100). We fabricated the devices first and then released the top portion of the silicon (≈ 19 μm) which is flexible and semi-transparent. We also performed chemical mechanical polishing to reuse the remaining wafer. A tested thermal actuator with 3 μm wide 240 μm hot arm and 10 μm wide 185 μm long cold arm deflected by 1.7 μm at 1 V. The fabricated thermal actuators exhibit similar performance before and after bending. We believe the demonstrated process will expand the horizon of flexible electronics into MEMS world devices. © 2014 IEEE.
Original languageEnglish (US)
Title of host publication2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
Number of pages4
ISBN (Print)9781479935086
StatePublished - Jan 2014

Bibliographical note

KAUST Repository Item: Exported on 2020-10-01


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