SnO2 sub-micron wires for gas sensors

P. Candeloro*, A. Carpentiero, S. Cabrini, E. Di Fabrizio, E. Comini, C. Baratto, G. Faglia, G. Sberveglieri, A. Gerardino

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

21 Scopus citations


In the present work a novel semiconductor metal-oxide (MOX) gas sensor is developed by means of lithographic techniques. The basic idea is to replace the continuous sensing film of standard MOX sensors with a pattern of wires in the sub-micron scale. Two approaches are followed: a plain lift-off process and a substrate patterning process. This work presents a comparison of the results of the two processes. The fabricated sensors are characterized by electrical measurements in different atmospheres and their responses are compared to with the ones of continuous film based sensors. An improvement of the performances of the patterned sensor is highlighted by the experimental data.

Original languageEnglish (US)
Pages (from-to)178-184
Number of pages7
JournalMicroelectronic Engineering
Issue number1-4
StatePublished - Mar 2005
Externally publishedYes
EventProceedings of the 30th International Conference on Micro- and Nano-Engineering -
Duration: Sep 19 2004Sep 22 2004


  • E-beam lithography
  • Gas sensors
  • Semiconductor metal-oxide
  • SiO reactive ion etching
  • Tin dioxide

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering


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