Smooth e-beam-deposited tin-doped indium oxide for III-nitride vertical-cavity surface-emitting laser intracavity contacts

J. T. Leonard, D. A. Cohen, B. P. Yonkee, R. M. Farrell, S. P. DenBaars, J. S. Speck, S. Nakamura

Research output: Contribution to journalArticlepeer-review

25 Scopus citations

Abstract

We carried out a series of simulations analyzing the dependence of mirror reflectance, threshold current density, and differential efficiency on the scattering loss caused by the roughness of tin-doped indium oxide (ITO) intracavity contacts for 405 nm flip-chip III-nitride vertical-cavity surface-emitting lasers (VCSELs). From these results, we determined that the ITO root-mean-square (RMS) roughness should be
Original languageEnglish (US)
Pages (from-to)145304
JournalJOURNAL OF APPLIED PHYSICS
Volume118
Issue number14
DOIs
StatePublished - 2015
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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