Slope-tunable Si nanorod arrays with enhanced antireflection and self-cleaning properties

Yi Ruei Lin; K. Y. Lai; Hsin Ping Wang; Jr Hau He

doi:10.1039/c0nr00402b

Slope-tunable Si nanorod arrays with enhanced antireflection and self-cleaning properties

Yi Ruei Lin, K. Y. Lai, Hsin Ping Wang, Jr Hau He^*

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

72 Scopus citations

Abstract

Slope-tunable Si nanorod arrays (NRAs) were fabricated with colloidal lithography and reactive ion etching (RIE). Sharpened NRAs fabricated by increasing the SF₆/O₂ flow ratio during RIE exhibit enhanced antireflection (AR) and hydrophobic properties, which are attributed to the smooth gradient in the effective refractive index of NRAs, and the enlarged water/air interface of the water drops in the NRA layers, respectively. Enhanced AR characteristics via modifying the slope of NRAs are accompanied by broad-band working ranges, omnidirectionality, and polarization insensitivity. Detailed experimental and theoretical analysis of slope-tunable NRAs should benefit the development of various self-cleaning optoelectronic devices with efficient light management.

Original language	English (US)
Pages (from-to)	2765-2768
Number of pages	4
Journal	Nanoscale
Volume	2
Issue number	12
DOIs	https://doi.org/10.1039/c0nr00402b
State	Published - Nov 2010
Externally published	Yes

ASJC Scopus subject areas

General Materials Science

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@article{e0e679b785094b23ab9e6f9893d5259b,

title = "Slope-tunable Si nanorod arrays with enhanced antireflection and self-cleaning properties",

abstract = "Slope-tunable Si nanorod arrays (NRAs) were fabricated with colloidal lithography and reactive ion etching (RIE). Sharpened NRAs fabricated by increasing the SF6/O2 flow ratio during RIE exhibit enhanced antireflection (AR) and hydrophobic properties, which are attributed to the smooth gradient in the effective refractive index of NRAs, and the enlarged water/air interface of the water drops in the NRA layers, respectively. Enhanced AR characteristics via modifying the slope of NRAs are accompanied by broad-band working ranges, omnidirectionality, and polarization insensitivity. Detailed experimental and theoretical analysis of slope-tunable NRAs should benefit the development of various self-cleaning optoelectronic devices with efficient light management.",

author = "Lin, {Yi Ruei} and Lai, {K. Y.} and Wang, {Hsin Ping} and He, {Jr Hau}",

year = "2010",

month = nov,

doi = "10.1039/c0nr00402b",

language = "English (US)",

volume = "2",

pages = "2765--2768",

journal = "Nanoscale",

issn = "2040-3364",

publisher = "Royal Society of Chemistry",

number = "12",

}

TY - JOUR

T1 - Slope-tunable Si nanorod arrays with enhanced antireflection and self-cleaning properties

AU - Lin, Yi Ruei

AU - Lai, K. Y.

AU - Wang, Hsin Ping

AU - He, Jr Hau

PY - 2010/11

Y1 - 2010/11

N2 - Slope-tunable Si nanorod arrays (NRAs) were fabricated with colloidal lithography and reactive ion etching (RIE). Sharpened NRAs fabricated by increasing the SF6/O2 flow ratio during RIE exhibit enhanced antireflection (AR) and hydrophobic properties, which are attributed to the smooth gradient in the effective refractive index of NRAs, and the enlarged water/air interface of the water drops in the NRA layers, respectively. Enhanced AR characteristics via modifying the slope of NRAs are accompanied by broad-band working ranges, omnidirectionality, and polarization insensitivity. Detailed experimental and theoretical analysis of slope-tunable NRAs should benefit the development of various self-cleaning optoelectronic devices with efficient light management.

AB - Slope-tunable Si nanorod arrays (NRAs) were fabricated with colloidal lithography and reactive ion etching (RIE). Sharpened NRAs fabricated by increasing the SF6/O2 flow ratio during RIE exhibit enhanced antireflection (AR) and hydrophobic properties, which are attributed to the smooth gradient in the effective refractive index of NRAs, and the enlarged water/air interface of the water drops in the NRA layers, respectively. Enhanced AR characteristics via modifying the slope of NRAs are accompanied by broad-band working ranges, omnidirectionality, and polarization insensitivity. Detailed experimental and theoretical analysis of slope-tunable NRAs should benefit the development of various self-cleaning optoelectronic devices with efficient light management.

UR - http://www.scopus.com/inward/record.url?scp=78649884662&partnerID=8YFLogxK

U2 - 10.1039/c0nr00402b

DO - 10.1039/c0nr00402b

M3 - Article

C2 - 20936223

AN - SCOPUS:78649884662

SN - 2040-3364

VL - 2

SP - 2765

EP - 2768

JO - Nanoscale

JF - Nanoscale

IS - 12

ER -

Slope-tunable Si nanorod arrays with enhanced antireflection and self-cleaning properties

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