TY - GEN
T1 - Simultaneous growth of MWCNTs at different temperatures in a variable gradient furnace
AU - Grossi, V.
AU - Urbani, A.
AU - Giugni, A.
AU - Cantalini, C.
AU - Santucci, S.
AU - Passacantando, M.
PY - 2009
Y1 - 2009
N2 - Multi-walled carbon nanotubes (MWCNTs) have been grown, simultaneously at different temperatures (600 °C, 700 °C, 725 °C, and 750 °C), by thermal chemical vapour deposition (CVD) of acetylene (C2H 2) gas, in ammonia (NH3) atmosphere. The samples have been characterized morphologically by scanning electron microscopy (SEM) and a structurally by Raman spectroscopy. These analyses show that, when the temperature of substrate increases, the CNT average diameter and the density distribution decrease, and the CNTs are less defective. However there is a temperature limit (725 °C) for CNT growth. We have grown CNTs onto Si 3N4/Si substrates with Pt electrodes, in order to realize the gas sensing devices. The CNTs grown at 725 °C, exhibit a fast response and a high sensitivity to NO2 gas.
AB - Multi-walled carbon nanotubes (MWCNTs) have been grown, simultaneously at different temperatures (600 °C, 700 °C, 725 °C, and 750 °C), by thermal chemical vapour deposition (CVD) of acetylene (C2H 2) gas, in ammonia (NH3) atmosphere. The samples have been characterized morphologically by scanning electron microscopy (SEM) and a structurally by Raman spectroscopy. These analyses show that, when the temperature of substrate increases, the CNT average diameter and the density distribution decrease, and the CNTs are less defective. However there is a temperature limit (725 °C) for CNT growth. We have grown CNTs onto Si 3N4/Si substrates with Pt electrodes, in order to realize the gas sensing devices. The CNTs grown at 725 °C, exhibit a fast response and a high sensitivity to NO2 gas.
KW - Carbon nanotubes
KW - Chemical vapour deposition
KW - Raman spectroscopy
KW - Scanning electron microscopy
UR - http://www.scopus.com/inward/record.url?scp=75649093062&partnerID=8YFLogxK
U2 - 10.4028/www.scientific.net/SSP.154.77
DO - 10.4028/www.scientific.net/SSP.154.77
M3 - Conference contribution
AN - SCOPUS:75649093062
SN - 3908451701
SN - 9783908451709
T3 - Solid State Phenomena
SP - 77
EP - 82
BT - Smart Materials for Smart Devices and Structures
PB - Trans Tech Publications Ltd
T2 - EMRS Symposium C: Smart Materials for Smart Devices and Structures
Y2 - 15 September 2008 through 19 September 2008
ER -