Simulation of SU-8 frequency-driven scratch drive actuators

David Conchouso Gonzalez; Armando Arpys Arevalo Carreno; David Castro; Ehab Jamal Al Rawashdeh; Manuel Valencia Garcia; Amir Omar Zaher; Jürgen Kosel; Ian G. Foulds

doi:10.1109/UKSim.2013.55

Simulation of SU-8 frequency-driven scratch drive actuators

David Conchouso Gonzalez, Armando Arpys Arevalo Carreno, David Castro, Ehab Jamal Al Rawashdeh, Manuel Valencia Garcia, Amir Omar Zaher, Jürgen Kosel, Ian G. Foulds

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

7 Scopus citations

Abstract

This paper presents the simulation of Scratch Drive Actuators (SDAs) for micro-robotic applications. SDAs use electrostatic forces to generate motion on top of an interdigitated electrode array. The purpose of this investigation is to evaluate several design geometries and micro-actuator configurations using ConventorWare®'s finite element analysis module. The study performed investigates the SDAs modal and electrostatic behavior and the effects of linking two or more SDAs together in a microrobot device. In addition, the interdigitated electrode array performance, used for power delivery, was studied by changing the thickness of its dielectric layer. We present our observations based on these studies, which will aid in the understanding and development of future SDA designs. © 2013 IEEE.

Original language	English (US)
Title of host publication	2013 UKSim 15th International Conference on Computer Modelling and Simulation
Publisher	Institute of Electrical and Electronics Engineers (IEEE)
Pages	803-808
Number of pages	6
ISBN (Print)	9780769549941
DOIs	https://doi.org/10.1109/UKSim.2013.55
State	Published - Apr 2013

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KAUST Repository Item: Exported on 2020-10-01

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10.1109/UKSim.2013.55

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Conchouso Gonzalez, D., Carreno, A. A. A., Castro, D., Al Rawashdeh, E. J., Valencia Garcia, M., Zaher, A. O., Kosel, J., & Foulds, I. G. (2013). Simulation of SU-8 frequency-driven scratch drive actuators. In 2013 UKSim 15th International Conference on Computer Modelling and Simulation (pp. 803-808). Institute of Electrical and Electronics Engineers (IEEE). https://doi.org/10.1109/UKSim.2013.55

@inproceedings{62dd9a3360a74f72a92d38a15d506fea,

title = "Simulation of SU-8 frequency-driven scratch drive actuators",

abstract = "This paper presents the simulation of Scratch Drive Actuators (SDAs) for micro-robotic applications. SDAs use electrostatic forces to generate motion on top of an interdigitated electrode array. The purpose of this investigation is to evaluate several design geometries and micro-actuator configurations using ConventorWare{\textregistered}'s finite element analysis module. The study performed investigates the SDAs modal and electrostatic behavior and the effects of linking two or more SDAs together in a microrobot device. In addition, the interdigitated electrode array performance, used for power delivery, was studied by changing the thickness of its dielectric layer. We present our observations based on these studies, which will aid in the understanding and development of future SDA designs. {\textcopyright} 2013 IEEE.",

author = "{Conchouso Gonzalez}, David and Carreno, {Armando Arpys Arevalo} and David Castro and {Al Rawashdeh}, {Ehab Jamal} and {Valencia Garcia}, Manuel and Zaher, {Amir Omar} and J{\"u}rgen Kosel and Foulds, {Ian G.}",

note = "KAUST Repository Item: Exported on 2020-10-01",

year = "2013",

month = apr,

doi = "10.1109/UKSim.2013.55",

language = "English (US)",

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Conchouso Gonzalez, D, Carreno, AAA, Castro, D, Al Rawashdeh, EJ, Valencia Garcia, M, Zaher, AO, Kosel, J & Foulds, IG 2013, Simulation of SU-8 frequency-driven scratch drive actuators. in 2013 UKSim 15th International Conference on Computer Modelling and Simulation. Institute of Electrical and Electronics Engineers (IEEE), pp. 803-808. https://doi.org/10.1109/UKSim.2013.55

Simulation of SU-8 frequency-driven scratch drive actuators. / Conchouso Gonzalez, David; Carreno, Armando Arpys Arevalo; Castro, David et al.
2013 UKSim 15th International Conference on Computer Modelling and Simulation. Institute of Electrical and Electronics Engineers (IEEE), 2013. p. 803-808.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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AU - Conchouso Gonzalez, David

AU - Carreno, Armando Arpys Arevalo

AU - Castro, David

AU - Al Rawashdeh, Ehab Jamal

AU - Valencia Garcia, Manuel

AU - Zaher, Amir Omar

AU - Kosel, Jürgen

AU - Foulds, Ian G.

N1 - KAUST Repository Item: Exported on 2020-10-01

PY - 2013/4

Y1 - 2013/4

N2 - This paper presents the simulation of Scratch Drive Actuators (SDAs) for micro-robotic applications. SDAs use electrostatic forces to generate motion on top of an interdigitated electrode array. The purpose of this investigation is to evaluate several design geometries and micro-actuator configurations using ConventorWare®'s finite element analysis module. The study performed investigates the SDAs modal and electrostatic behavior and the effects of linking two or more SDAs together in a microrobot device. In addition, the interdigitated electrode array performance, used for power delivery, was studied by changing the thickness of its dielectric layer. We present our observations based on these studies, which will aid in the understanding and development of future SDA designs. © 2013 IEEE.

AB - This paper presents the simulation of Scratch Drive Actuators (SDAs) for micro-robotic applications. SDAs use electrostatic forces to generate motion on top of an interdigitated electrode array. The purpose of this investigation is to evaluate several design geometries and micro-actuator configurations using ConventorWare®'s finite element analysis module. The study performed investigates the SDAs modal and electrostatic behavior and the effects of linking two or more SDAs together in a microrobot device. In addition, the interdigitated electrode array performance, used for power delivery, was studied by changing the thickness of its dielectric layer. We present our observations based on these studies, which will aid in the understanding and development of future SDA designs. © 2013 IEEE.

UR - http://hdl.handle.net/10754/564693

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DO - 10.1109/UKSim.2013.55

M3 - Conference contribution

SN - 9780769549941

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EP - 808

BT - 2013 UKSim 15th International Conference on Computer Modelling and Simulation

PB - Institute of Electrical and Electronics Engineers (IEEE)

ER -

Simulation of SU-8 frequency-driven scratch drive actuators

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