Simplified manufacturable band edge metal gate solution for NMOS without a capping layer

H. R. Harris, H. Alshareef, H. C. Wen, S. Krishnan, K. Choi, H. Luan, D. Heh, C. S. Park, H. B. Park, M. Hussain, B. S. Ju, P. D. Kirsch, S. C. Song, P. Majhi, B. H. Lee, R. Jammy

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review