Silicon fabric for multi-functional applications

Galo T. Sevilla; Jhonathan Prieto Rojas; Sally Ahmed; Aftab M. Hussain; Salman Bin Inayat; Muhammad Mustafa Hussain

doi:10.1109/Transducers.2013.6627347

Silicon fabric for multi-functional applications

Galo T. Sevilla, Jhonathan Prieto Rojas, Sally Ahmed, Aftab M. Hussain, Salman Bin Inayat, Muhammad Mustafa Hussain

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

18 Scopus citations

Abstract

This paper reports a generic process flow to fabricate mechanically flexible and optically semi-transparent thermoelectric generators (TEGs), micro lithium-ion batteries (μLIB) and metal-oxide-semiconductor capacitors (MOSCAPs) on mono-crystalline silicon fabric platforms from standard bulk silicon (100) wafers. All the fabricated devices show outstanding mechanical flexibility and performance, making an important step towards monolithic integration of Energy Chip (self-powered devices) including energy harvesters and electronic devices on flexible platforms. We also report a recyclability process for the remaining bulk substrate after release, allowing us to achieve a low cost flexible platform for high performance applications. © 2013 IEEE.

Original language	English (US)
Title of host publication	2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)
Publisher	Institute of Electrical and Electronics Engineers (IEEE)
Pages	2636-2639
Number of pages	4
ISBN (Print)	9781467359818
DOIs	https://doi.org/10.1109/Transducers.2013.6627347
State	Published - Jun 2013

Bibliographical note

KAUST Repository Item: Exported on 2020-10-01

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

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10.1109/Transducers.2013.6627347

Cite this

Sevilla, G. T., Rojas, J. P., Ahmed, S., Hussain, A. M., Inayat, S. B., & Hussain, M. M. (2013). Silicon fabric for multi-functional applications. In 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) (pp. 2636-2639). Institute of Electrical and Electronics Engineers (IEEE). https://doi.org/10.1109/Transducers.2013.6627347

@inproceedings{4da34dcba50d4993b83fbd10afda68ea,

title = "Silicon fabric for multi-functional applications",

abstract = "This paper reports a generic process flow to fabricate mechanically flexible and optically semi-transparent thermoelectric generators (TEGs), micro lithium-ion batteries (μLIB) and metal-oxide-semiconductor capacitors (MOSCAPs) on mono-crystalline silicon fabric platforms from standard bulk silicon (100) wafers. All the fabricated devices show outstanding mechanical flexibility and performance, making an important step towards monolithic integration of Energy Chip (self-powered devices) including energy harvesters and electronic devices on flexible platforms. We also report a recyclability process for the remaining bulk substrate after release, allowing us to achieve a low cost flexible platform for high performance applications. {\textcopyright} 2013 IEEE.",

author = "Sevilla, {Galo T.} and Rojas, {Jhonathan Prieto} and Sally Ahmed and Hussain, {Aftab M.} and Inayat, {Salman Bin} and Hussain, {Muhammad Mustafa}",

note = "KAUST Repository Item: Exported on 2020-10-01",

year = "2013",

month = jun,

doi = "10.1109/Transducers.2013.6627347",

language = "English (US)",

isbn = "9781467359818",

pages = "2636--2639",

booktitle = "2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)",

publisher = "Institute of Electrical and Electronics Engineers (IEEE)",

}

Sevilla, GT, Rojas, JP, Ahmed, S, Hussain, AM, Inayat, SB & Hussain, MM 2013, Silicon fabric for multi-functional applications. in 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII). Institute of Electrical and Electronics Engineers (IEEE), pp. 2636-2639. https://doi.org/10.1109/Transducers.2013.6627347

Silicon fabric for multi-functional applications. / Sevilla, Galo T.; Rojas, Jhonathan Prieto; Ahmed, Sally et al.
2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII). Institute of Electrical and Electronics Engineers (IEEE), 2013. p. 2636-2639.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Silicon fabric for multi-functional applications

AU - Sevilla, Galo T.

AU - Rojas, Jhonathan Prieto

AU - Ahmed, Sally

AU - Hussain, Aftab M.

AU - Inayat, Salman Bin

AU - Hussain, Muhammad Mustafa

N1 - KAUST Repository Item: Exported on 2020-10-01

PY - 2013/6

Y1 - 2013/6

N2 - This paper reports a generic process flow to fabricate mechanically flexible and optically semi-transparent thermoelectric generators (TEGs), micro lithium-ion batteries (μLIB) and metal-oxide-semiconductor capacitors (MOSCAPs) on mono-crystalline silicon fabric platforms from standard bulk silicon (100) wafers. All the fabricated devices show outstanding mechanical flexibility and performance, making an important step towards monolithic integration of Energy Chip (self-powered devices) including energy harvesters and electronic devices on flexible platforms. We also report a recyclability process for the remaining bulk substrate after release, allowing us to achieve a low cost flexible platform for high performance applications. © 2013 IEEE.

AB - This paper reports a generic process flow to fabricate mechanically flexible and optically semi-transparent thermoelectric generators (TEGs), micro lithium-ion batteries (μLIB) and metal-oxide-semiconductor capacitors (MOSCAPs) on mono-crystalline silicon fabric platforms from standard bulk silicon (100) wafers. All the fabricated devices show outstanding mechanical flexibility and performance, making an important step towards monolithic integration of Energy Chip (self-powered devices) including energy harvesters and electronic devices on flexible platforms. We also report a recyclability process for the remaining bulk substrate after release, allowing us to achieve a low cost flexible platform for high performance applications. © 2013 IEEE.

UR - http://hdl.handle.net/10754/564752

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DO - 10.1109/Transducers.2013.6627347

M3 - Conference contribution

SN - 9781467359818

SP - 2636

EP - 2639

BT - 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)

PB - Institute of Electrical and Electronics Engineers (IEEE)

ER -

Sevilla GT, Rojas JP, Ahmed S, Hussain AM, Inayat SB, Hussain MM. Silicon fabric for multi-functional applications. In 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII). Institute of Electrical and Electronics Engineers (IEEE). 2013. p. 2636-2639 doi: 10.1109/Transducers.2013.6627347

Silicon fabric for multi-functional applications

Abstract

Bibliographical note

UN SDGs

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