Si-nanocrystals/SiO2 thin films obtained by pyrolysis of sol-gel precursors

G. Das*, L. Ferraioli, P. Bettotti, F. De Angelis, G. Mariotto, L. Pavesi, E. Di Fabrizio, G. D. Soraru

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

31 Scopus citations

Abstract

Polymer pyrolysis to nanoceramics is employed for the production of photo-luminescent thin film samples, consisting of Si-nanocrystals dispersed in silica matrix. Thin films were deposited on Si wafer by spin-coating technique from a triethoxysilane-derived sol-gel solution. This is a fast process and a low cost technique. Samples were annealed at different temperatures between 600 °C and 1300 °C, under N2 gas atmosphere. Structural evolution and luminescence from Si-ncs vs. temperature were investigated by FT-IR absorption spectroscopy and photo-luminescence. Absorption spectrum of As-Prep sample shows several vibrational bands due to Si-H, C-Hx, and Si-O-Si structural units, without any appreciable luminescence. Silica phase segregation and intense PL (790 nm) due to Si-ncs were observed on annealing at T > 1000 °C.

Original languageEnglish (US)
Pages (from-to)6804-6807
Number of pages4
JournalThin Solid Films
Volume516
Issue number20
DOIs
StatePublished - Aug 30 2008
Externally publishedYes

Keywords

  • Fourier transform infrared absorption spectroscopy
  • Photo-luminescence
  • Polymer pyrolysis
  • Si-nanocrystals
  • Sol-gel

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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