Shaping X-rays by diffractive coded nano-optics

E. Di Fabrizio*, S. Cabrini, D. Cojoc, F. Romanato, L. Businaro, M. Altissimo, B. Kaulich, T. Wilhein, J. Susini, M. De Vittorio, E. Vitale, G. Gigli, R. Cingolani

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

13 Scopus citations


In this paper we report results obtained in the fabrication and use of novel coded diffractive nano-optics that, beyond focusing, can perform new optical functions. In particular, the intensity of light in the space beyond the optical elements can be redistributed with almost complete freedom. These novel X-ray optical elements have been tested and found to perform multi-focusing in single or multiple focal planes and beam shaping of a generic monochromatic beam into a desired continuous geometrical pattern. Already available extreme ultraviolet and X-ray sources are suitable as ideal sources for such diffractive optical elements. Their new optical functions have been tested in differential interference contrast microscopy and we suggest their use also in maskless lithography and chemical vapour deposition induced by extreme ultraviolet and X-ray radiation.

Original languageEnglish (US)
Pages (from-to)87-95
Number of pages9
JournalMicroelectronic Engineering
StatePublished - Jun 2003
Externally publishedYes
EventProceedings of the 28th International Conference on MNE - Lugano, Switzerland
Duration: Sep 16 2002Sep 19 2002


  • Coded diffractive optical element
  • Nano-optics
  • X-Ray beamshaping

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering


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