Shape-controlled fabrication of micro/nanoscale triangle, square, wire-like, and hexagon pits on silicon substrates induced by anisotropic diffusion and silicide sublimation

Huatao Wang, Zhou Zhang, Lai Mun Wong, Shijie Wang, Zhipeng Wei, Gong Ping Li, Guozhong Xing, Donglai Guo, Dandan Wang, Tom Wu*

*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

22 Scopus citations

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