| Original language | English (US) |
|---|---|
| Pages | 260 |
| Number of pages | 1 |
| State | Published - 1982 |
| Externally published | Yes |
ASJC Scopus subject areas
- General Engineering
Senstive Deep UV Resist Incorporation Chemical Amplification.
J. M.J. Frechet*, Hiroshi Ito, C. Grant Willson
*Corresponding author for this work
Research output: Contribution to conference › Paper › peer-review
84
Scopus
citations